For the investigation of dopant profiles in implanted Si_1-xGe_x, the implanted B and As profiles are measured using SIMS (secondary ion mass spectrometry). The fundamental ion-solid interactions of implantation in Si_1-xGe_x are discussed and explained using SRIM, UT-marlowe, and T-dyn programs. The annealed simulation profiles are also analyzed and compared with experimental data. In comparison with the SIMS data, the boron simulation results show 8% deviations of R_p and 1.8% deviations of ΔR_p owing to relatively small lattice strain and relaxation on the sample surface. In comparison with the SIMS data, the simulation results show 4.7% deviations of R_p and 8.1% deviations of ΔR_p in the arsenic implanted Si_0.2Ge_0.8 layer and 8.5% deviations of R_p and 38% deviations of ΔR_p in the Si_0.5Ge_0.5 layer. An analytical method for obtaining the dopant profile is proposed and also compared with experimental and simulation data herein. For the high-speed CMOSFET (complementary metal oxide semiconductor field effect transistor) and HBT (heterojunction bipolar transistor), the study of dopant profiles in the Si_1-xGe_x layer becomes more important for accurate device scaling and fabrication technologies.

The computational fourier-transform moire (CFTM) method has been briefly explained and this method was used to perform strain analysis of a misfit dislocation in a strained Si/Si_0.55Ge_0.45 layer. An essential advantage of the CFTM method is that it does not require unwrapping, such that errors due to improper unwrapping can be excluded. The analysis results revealed that the Si layer was grown with tensile stress on Si_0.55Ge_0.45 and lattice constant of the Si layer along the growth direction was 1.9% smaller than that of Si_0.55Ge_0.45. On the other hand, strain of the misfit dislocation in the strained Si/Si_0.55Ge_0.45 layer was maximum at the dislocation core due to an extra half-plane and the e_xx and e_yy values were positive and negative, respectively, along the direction of a burgers vector.

For the application of photo-detector as active layer, we have studied how to deposit SiGe thin film using an independent Si target and Ge target, respectively. Both targets were synthesized by purity of 99.999%. Plasma generators were generated by radio frequency (rf, 13.56 MHz) and direct current (dc) power. When Ge and Si targets were sputtered by dc and rf power, respectively, we could observe the growth of highly crystalline Ge thin film at the temperature of 400℃ from the result of raman spectroscopy and X-ray diffraction method. However, SiGe thin film did not deposit above method. Inversely, we changed target position like that Ge and Si targets were sputtered by rf and dc power, respectively. Although Ge crystalline growth without Si target sputtering deteriorated considerably, the growth of SiGe thin film was observed with increase of Si dc power. SiGe thin film was evaluated as microcrystalline phase which included (111) and (220) plane by X-ray diffraction method.