Comparison of Electrical Characteristics of SiGe pMOSFETs Formed on Bulk-Si and PD-SOI

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Bulk-Si와 PD-SOI에 형성된 SiGe p-MOSFET의 전기적 특성의 비교

최상식, 최아람, 김재연, 양전욱, 한태현, 조덕호, 황용우, 심규환

Comparison of Electrical Characteristics of SiGe pMOSFETs Formed on Bulk-Si and PD-SOI

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J Electr Electron Mater 2007;20(6):491-495.
Published online: June 1, 2007

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Keywords: SiGe, PD SOI, MOSFET, DIBL

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Comparison of Electrical Characteristics of SiGe pMOSFETs Formed on Bulk-Si and PD-SOI

J Electr Electron Mater. 2007;20(6):491-495. Published online June 1, 2007

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Comparison of Electrical Characteristics of SiGe pMOSFETs Formed on Bulk-Si and PD-SOI

J Electr Electron Mater. 2007;20(6):491-495. Published online June 1, 2007

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Bulk-Si와 PD-SOI에 형성된 SiGe p-MOSFET의 전기적 특성의 비교

Comparison of Electrical Characteristics of SiGe pMOSFETs Formed on Bulk-Si and PD-SOI

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