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어닐링과 산화에 따른 Tungsten polycide 막 특성의 변화

홍성현, 이장혁, 이종무, 임호빈

Effects of Annealing and Oxidation on the Properties of the Tungsten polycide film

Sung Hyun Hong, Jang Hyuk Lee, Chong Mu Lee, Ho Bin Im
J Electr Electron Mater 1990;3(3):178-186.
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Effects of Annealing and Oxidation on the Properties of the Tungsten polycide film
J Electr Electron Mater. 1990;3(3):178-186.
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Effects of Annealing and Oxidation on the Properties of the Tungsten polycide film
J Electr Electron Mater. 1990;3(3):178-186.
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