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스퍼터링으로 퇴적시킨 바나듐 산화막의 구조적 , 광학적 특성에 미치는 산소 어닐링의 효과

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Effect of Oxygen Annealing on the Structural and Optical Properties of Sputter - deposited Vanadium Oxide Thin Films

Bok Gil Choi, Chang Kyu Choi, Sung Jin Kim
J Electr Electron Mater 2000;13(12):1003-1010.
Published online: December 1, 2000
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Effect of Oxygen Annealing on the Structural and Optical Properties of Sputter - deposited Vanadium Oxide Thin Films
J Electr Electron Mater. 2000;13(12):1003-1010.   Published online December 1, 2000
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
Effect of Oxygen Annealing on the Structural and Optical Properties of Sputter - deposited Vanadium Oxide Thin Films
J Electr Electron Mater. 2000;13(12):1003-1010.   Published online December 1, 2000
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