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"Thermal annealing"

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"Thermal annealing"

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Regular Paper

Solvent-Dependent Crystallization and Charge Transport Evolution in Thermally Annealed P3HT:PCBM Bulk Heterojunction Solar Cells
Dong-Kyun Kim, Byungyou Hong, Hyung Jin Kim
J Electr Electron Mater 2026;39(4):400-406.   Published online July 1, 2026
DOI: https://doi.org/10.4313/JEEM.2026.39.4.10
Organic solar cells based on bulk heterojunction (BHJ) structures have attracted considerable attention because of their low fabrication cost, mechanical flexibility, and compatibility with solution-processing techniques. In BHJ organic photovoltaic devices, nanoscale morphology and crystallinity of the photoactive layer critically influence photovoltaic performance. In this study, the effects of solvent selection and thermal annealing on crystallization evolution and photovoltaic characteristics of P3HT:PCBM organic solar cells were systematically investigated. Three different solvents, including toluene, chlorobenzene (CB), and dichlorobenzene (DCB), were employed for active-layer fabrication, followed by post-thermal annealing treatment. UV–visible absorption spectroscopy revealed solvent-dependent differences in molecular ordering and intermolecular π–π interactions within the active layer. X-ray diffraction analysis confirmed that thermal annealing significantly enhanced crystallinity and lamellar ordering of P3HT domains, particularly for CB-processed films. Electrical characterization demonstrated that solvent evaporation behavior strongly affects photovoltaic performance. Among the investigated devices, the thermally annealed CB-processed device exhibited the highest power conversion efficiency of 1.83% with an enhanced short-circuit current density of 7.057 mA cm⁻². The improved device performance is attributed to optimized crystallization behavior and balanced nanoscale phase separation induced by the moderate evaporation characteristics of CB. In contrast, although DCB-assisted films exhibited relatively strong optical absorption and enhanced crystallinity, excessively slow solvent evaporation likely induced excessive aggregation and coarse phase separation, limiting efficient photovoltaic characteristics. These results demonstrate that solvent engineering combined with thermal annealing is an effective strategy for controlling morphology evolution and crystallization behavior in P3HT:PCBM bulk heterojunction solar cells.
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Enhanced Photoluminescence of CsPbBr3 via Improved Optical Transparency of Thermally Treated GaN Nanowires
Kwang Jae Lee, Jungwook Min
J Electr Electron Mater 2026;39(3):272-280.
Published online May 1, 2026
DOI: https://doi.org/10.4313/JEEM.2026.39.3.6
GaN nanowire (NW)-based hybrid structures have attracted attention for optoelectronic applications due to their high surface area and efficient carrier transport. However, the optical transparency of GaN NWs is often limited by unintended residual species accumulated on the surface and in the inter-wire regions, as well as defect-related absorption, leading to reduced light transmission. In this work, we demonstrate that thermal annealing significantly improves the optical transparency of GaN NWs grown on indium tin oxide (ITO)/glass substrates. The transmittance increased from 47.9% to 78.5% at 550 nm after rapid thermal annealing at 800oC for 3 min, while a comparable value (~75.5%) was achieved at 600oC for 5 min. PbBr3 was deposited onto the GaN NWs to form hybrid structures, and temperature-dependent photoluminescence (TDPL) measurements revealed enhanced emission stability with suppressed peak shift and reduced spectral broadening. Arrhenius analysis based on a two-channel model revealed that the activation energy of the dominant non-radiative recombination pathway increased from 62 meV in the as-grown sample to 85 meV after thermal annealing, while its relative contribution remained nearly unchanged. In contrast, the shallow trap-assisted pathway exhibited a similar activation energy of approximately 6 meV in both samples, but its contribution decreased from 0.35 to 0.17 after annealing. As a result, the internal quantum efficiency (IQE) improved from 75.9% to 87.4%. These results show that thermal annealing improves optical transparency by removing residuals and suppresses defect-related recombination, leading to enhanced carrier dynamics and improved optical performance of PbBr3-based hybrid structures.
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Enhanced Ambipolarity of Semiconducting Carbon Nanotubes by Thermal Annealing for High-Performance CMOS-like Circuits
Jeong-min Lee, Ji-yoon Jung, Kang-jun Baeg
J Electr Electron Mater 2025;38(5):530-537.   Published online September 1, 2025
DOI: https://doi.org/10.4313/JEEM.2025.38.5.8
With the advancement of the information society, the demand for highly integrated and multi-functional electronic devices is rapidly increasing. To meet these demands, high-performance transistors with low power consumption, high-speed operating, and mechanical flexibility are essential. Among various candidates, semiconducting single-walled carbon nanotubes (s-SWCNT)-based transistors, which exhibit intrinsically ambipolar characteristics, have emerged as promising components for CMOS-like circuits. In this study, s-SWCNT were selectively dispersed using rr-P3DDT, a thiophene-based conjugated polymer, and filed-effect transistors (FETs) were fabricated by inducting directional alignment for enhanced charge transport through an off-centered spin-coating process. The electrical characteristics of the fabricated s-SWCNT FETs were evaluated under various thermal annealing conditions (100℃, 150℃, 200℃, and 250℃). Off-centered spin-coated and high temperature annealed s- SWCNT FETs exhibited high field-effect mobilities over 5 cm²/Vs in both p-type and n-type operation, along with ideal Vshaped ambipolar transfer curves. These results indicate a significant enhancement in ambipolar performance due to efficient desorption of residual oxygen and water molecules in active channel via high temperature annealing. Furthermore, CMOS-like inverter circuits demonstrated an ideal inversion voltage (VIN = VDD/2) and a high voltage gain of approximately 9.5. These findings highlight the potential of SWCNT-based materials for realizing next-generation flexible electronic circuits that combine high-performance, energy efficiency, and simplified solution-processing.
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Effect on the Thermal Treatment for Improving Efficiency in Silicon Heterojunction Solar Cells
Hyeong Gi Park, Junsin Yi
J Electr Electron Mater 2024;37(4):439-444.   Published online July 1, 2024
DOI: https://doi.org/10.4313/JKEM.2024.37.4.12
This study investigates the post-thermal treatment effects on the efficiency of silicon heterojunction solar cells, specifically examining the influence of annealing on p-type microcrystalline silicon oxide and ITO thin films. By assessing changes in carrier concentration, mobility, resistivity, transmittance, and optical bandgap, we identified conditions that optimize these properties. Results reveal that appropriate annealing significantly enhances the fill factor and current density, leading to a notable improvement in overall solar cell efficiency. This research advances our understanding of thermal processing in siliconbased photovoltaics and provides valuable insights into the optimization of production techniques to maximize the performance of solar cells.
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The Effect of Crystallographic and Optical Properties Under Rapid Thermal Annealing Conditions on Amorphous Ga2O3 Deposited Using RF Sputtering System
Hyungmin Kim, Sangbin Park, Jeongsoo Hong, Kyunghwan Kim
J Electr Electron Mater 2023;36(6):576-581.   Published online November 1, 2023
DOI: https://doi.org/10.4313/JKEM.2023.36.6.6
The Ga2O3 thin films were deposited using an RF sputtering system and the effect of crystallographic and optical properties under rapid thermal annealing conditions on Ga2O3 thin film was evaluated. A rapid thermal annealing method can fabricate a crystalline Ga2O3 thin film which is applied to various fields with a low cost and a high efficiency compared with the conventional post-annealing method. In this study, the Ga2O3 treated at 900℃ for 1 min showed the beta and gamma phases in XRD measurement. In optical properties, the crystalline Ga2O3 represented a high transmittance of more than 80% in the visible region and was calculated with a high optical bandgap energy of 4.58 eV. The beta and gamma phases Ga2O3 can be obtained by adjusting the rapid thermal annealing temperatures, and the various properties such as the optical bandgap energy can be controlled. Moreover, it is expected that crystalline Ga2O3 can be applied to various devices by controlling not only temperature but process time.
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Electro-Thermal Annealing of 3D NAND Flash Memory Using Through-Silicon Via for Improved Heat Distribution
Young-seo Son, Khwang-sun Lee, Yu-jin Kim, Jun-young Park
J Electr Electron Mater 2023;36(1):23-28.   Published online January 1, 2023
DOI: https://doi.org/10.4313/JKEM.2023.36.1.4
This paper demonstrates a novel NAND flash memory structure and annealing configuration including through-silicon via (TSV) inside the silicon substrate to improve annealing efficiency using an electro-thermal annealing (ETA) technique. Compared with the conventional ETA which utilizes WL-to-WL current flow, the proposed annealing method has a higher annealing temperature as well as more uniform heat distribution, because of thermal isolation on the silicon substrate. In addition, it was found that the annealing temperature is related to the electrical and thermal conductivity of the TSV materials. As a result, it is possible to improve the reliability of NAND flash memory. All the results are discussed based on 3-dimensional (3-D) simulations with the aid of the COMSOL simulator.
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Study on Improving the Mechanical Stability of 3D NAND Flash Memory String During Electro-Thermal Annealing
Yu-jin Kim, Jun-young Park
J Electr Electron Mater 2022;35(3):246-254.   Published online May 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.3.6
Localized heat can be generated using electrically conductive word-lines built into a 3D NAND flash memory string. The heat anneals the gate dielectric layer and improves the endurance and retention characteristics of memory cells. However, even though the electro-thermal annealing can improve the memory operation, studies to investigate material failures resulting from electro-thermal stress have not been reported yet. In this context, this paper investigated how applying electro-thermal annealing of 3D NAND affected mechanical stability. Hot-spots, which are expected to be mechanically damaged during the electro-thermal annealing, can be determined based on understanding material characteristics such as thermal expansion, thermal conductivity, and electrical conductivity. Finally, several guidelines for improving mechanical stability are provided in terms of bias configuration as well as alternative materials.
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Investigation of Mechanical Stability of Nanosheet FETs During Electro-Thermal Annealing
Dong-hyun Wang, Jun-young Park
J Electr Electron Mater 2022;35(1):50-57.   Published online January 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.1.8
Reliability of CMOS has been severed under aggressive device scaling. Conventional technologies such as lightly doped drain (LDD) and forming gas annealing (FGA) have been applied for better device reliability, but further advances are modest. Alternatively, electro-thermal annealing (ETA) which utilizes Joule heat produced by electrodes in a MOSFET, has been newly introduced for gate dielectric curing. However, concerns about mechanical stability during the electro-thermal annealing, have not been discussed, yet. In this context, this paper demonstrates the mechanical stability of nanosheet FET during the electro-thermal annealing. The effect of mechanical stresses during the electro-thermal annealing was investigated with respect to device design parameters.
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The Electrical Properties of Post-Annealing in Neutron-Irradiated 4H-SiC MOSFETs
Taeseop Lee, Jae-in An, So-mang Kim, Sung-joon Park, Seulki Cho, Kee-nam Choo, Man-soon Cho, Sang-mo Koo
J Electr Electron Mater 2018;31(4):198-202.   Published online May 1, 2018
In this work, we have investigated the effect of a 30-min thermal anneal at 550℃ on the electrical characteristics of neutron-irradiated 4H-SiC MOSFETs. Thermal annealing can recover the on/off characteristics of neutron-irradiated 4H-SiC MOSFETs. After thermal annealing, the interface-trap density decreased and the effective mobility increased in terms of the on-characteristics. This finding could be due to the improvement of the interfacial state from thermal annealing and the reduction in Coulomb scattering due to the reduction in interface traps. Additionally, in terms of the off-characteristics, the thermal annealing resulted in the recovery of the breakdown voltage and leakage current. After the thermal annealing, the number of positive trapped charges at the MOSFET interface was decreased.
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Effect of the Sulfurization Temperature and Annealing Time of E-Beam Evaporated Sn Precursors on the Growth of SnSx Thin Films
Tingjian Huang, Jeha Kim
J Electr Electron Mater 2017;30(11):734-739.   Published online November 1, 2017
We prepared SnSx thin films on both soda-lime glass (SLG) and molybdenum(Mo)/SLG substrates by a two-step process using a Sn precursor followed by sulfur reaction in rapid thermal annealing (RTA) at different sulfurization temperatures (Ts = 200℃, 230℃, 250℃, and 300℃) and annealing times (ts = 10 min and 30 min). The single SnS phase was dominant for 200℃≤Ts<250℃, while an additional phase of SnS2 was appeared at Ts≥250℃ alongside SnS. The SnS grains in all the samples showed strong growth along the preferred [040] direction. The band-gap energy (Eg) of the films was estimated to be 1.24 eV.
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Study on the Thin-film Transistors Based on TiO2 Active-channel Using Atomic Layer Deposition Technique
Sung Jin Kim
J Electr Electron Mater 2015;28(7):415-418.   Published online July 1, 2015
In this paper, TiO2 based thin-film transistors (TFTs) were fabricated using by an atomic layer deposition with high aspect ratio and excellent step coverage. Ti02 semiconducting layer was deposited showing a rutile phase through the rapid thermal annealing process, and exhibited TFT characteristics with a 200 pm channel length of low-leakage currents (none of current flow during off-state), stable threshold voltages (-10 V - 0 V), and a much higher on/off current ratio (
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Fabrication and Properties of ZnSnO3 piezoelectric Films Deposited by a Pulsed Laser Deposition
Byeong Ju Park, Soon Gil Yoon
J Electr Electron Mater 2014;27(1):18-21.   Published online January 1, 2014
Because the Pb-based piezoelectric materials showed problems such as an environmentalpollution. lead-free ZnSnO3 materials were studied in the present study. The ZnSnO3 thin films weredeposited at 640℃ on Pt/Ti/SiO2 substrate by pulsed laser deposition (PLD) and were annealed for 5 minat 750℃ using rapid thermal annealing (RTA) in nitrogen atmosphere. Samples annealed at 750℃ showeda smooth morphology and an improvement of the dielectric and leakage properties, as compared withas-grown samples. However, electrical properties of the ZnSnO3 thin films obtained in the present studyshould be improved for piezoelectric applications.
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Preparation and Evaluation of the Properties of Al-doped Zinc Oxide (AZO) Films Deposition by Rapid Thermal Annealing
Sung Jin Kim, Kyoon Choi, Se Young Choi
J Electr Electron Mater 2012;25(7):543-551.   Published online July 1, 2012
In this study, transparent conducting Al-doped Zinc Oxide (AZO) films with a thickness of 150 nm were prepared on corning glass substrate by the RF magnetron sputtering with using a Al-doped zinc oxide (AZO), (Al2o3: 2 wt%) target at room temperature. This study investigated the effect of rapid thermal annealing temperature and oxygen ambient on structural, electrical and optical properties of Al-doped zinc oxide (AZO) thin films. The films were annealed at temperatures ranging from 400 to 700℃ by using Rapid thermal equipment in oxygen ambient. The effect of RTA treatment on the structural properties were studied by x-ray diffraction and atomic force microscopy. It is observed that the Al-doped zinc oxide (AZO) thin film annealed at 500℃ at 5 minute oxygen ambient gas reveals the strongest XRD emission intensity and narrowest full width at half maximum among the temperature studied. The enhanced UV emission from the film annealed at 500℃ at 5 minute oxygen ambient gas is attributed to the improved crystalline quality of Al-doped zinc oxide (AZO) thin film due to the effective relaxation of residual compressive stress and achieving maximum grain size.
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Nano Materials and Devices : The Electrical Properties of GaN Individual Nanorod Devices by Wet-etching of the Nanorod Surface and Annealing Treatment
Hyun Jin Ji, Jae Wan Choi, Gyu Tae Kim
J Electr Electron Mater 2011;24(2):152-155.   Published online February 1, 2011
Even though nano-scale materials were very advantageous for various applications, there are still problems to be solved such as the stabilization of surface state and realization of low contact resistances between a semiconducting nanowire and electrodes in nano-electronics. It is well known that the effects of contacts barrier between nano-channel and metal electrodes were dominant in carrier transportation in individual nano-electronics. In this report, it was investigated the electrical properties of GaN nanorod devices after chemical etching and rapid thermal annealing for making good contacts. After KOH wet-etching of the contact area the devices showed better electrical performance compared with non-treated GaN individual devices but still didn`t have linear voltage-current characteristics. The shape of voltage-current properties of GaN devices were improved remarkably after rapid thermal annealing as showing Ohmic behaviors with further bigger conductivities. Even though chemical etching of the nanorod surfaces could cause scattering of carriers, in here it was shown that the most important and dominant factor in carrier transport of nano-electronics was realization of low contact barrier between nano-channel and metal electrodes surely.
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Effects of Annealing Temperature and Atmosphere on Properties of Porous Silicon
Hyun Young Choi, Kwang Gug Yim, Su Min Jeon, Min Young Cho, Ghun Sik Kim, Min Su Kim, Dong Yul Lee, Jin Soo Kim, Jong Su Kim, Jae Young Leem
J Electr Electron Mater 2010;23(8):581-586.   Published online August 1, 2010
Abstract: The porous Si (PS) was annealed at various temperature in air, argon, and nitrogen atmosphere. Structural and optical properties of the annealed PS were investigated by scanning electron microscopy (SEM) and photoluminescence (PL). It is found that the shape of pore is changed from circle to channel as increasing annealing temperature which was annealed in air and argon atmosphere. In case of PS annealed in nitrogen atmosphere, the shape of pore is changed from channel to circle with increase annealing temperature from 600 to 800℃. The PL peak position is blue-shifted with increasing annealing temperature. As annealing temperature increases, the PL intensity of the PS annealed in argon is decreased but that of the PS annealed in nitrogen is increased. It might be due to the formation of Si-N bonds and it passivates the non-radiative centers which is Si dangling bonds on the surface of the PS.
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Structural, Electrical, and Optical Properties of AZO Thin Films Subjected to Rapid Thermal Annealing Temperature
Jae Yong Jung, Shin Ho Cho
J Electr Electron Mater 2010;23(4):280-286.   Published online April 1, 2010
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Properly Changes of Europium-Silicate Thin Films depending on the Ambient Gas
J Electr Electron Mater 2007;20(3):263-267.   Published online March 1, 2007
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Temperature Dependence on Electrical Characterization of Epitaxially Grown AlN Film on 6H-SiC Structures
J Electr Electron Mater 2006;19(1):18-22.   Published online January 1, 2006
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Manufacture of Precision Thin Film Resistors using Ni-Cr Alloy and Their Properties
J Electr Electron Mater 2006;19(1):52-57.   Published online January 1, 2006
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Effect of Ambient Gases on Thermal Annealed ZnO Films deposited on Si(111) Substrates
J Electr Electron Mater 2005;18(8):734-738.   Published online August 1, 2005
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Effect of Oxygen Contents in Thermal Annealed ZnO Films on Structural and Optical Properties
J Electr Electron Mater 2005;18(7):600-604.   Published online July 1, 2005
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