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"Sheet"

Study on Hetero Gate Dielectrics to Reduce Ambipolar Current in Nanosheet Tunneling FETs
A-young Kim, Da-eun Bang, Hyo-jun Park, Tae-hyun Kil, Ju-won Yeon, Moon-kwon Lee, Eui-cheol Yun, Min-woo Kim, Su-jin Jeon, Moon-seok Kim, Jun-young Park
J Korean Inst Electr Electron Mater Eng 2025;38(3):296-301.   Published online May 1, 2025
DOI: https://doi.org/10.4313/JKEM.2025.38.3.9
Aggressive device scaling has severely degraded the switching characteristics of CMOS transistors. This issue has led to the development of tunneling FETs (TFETs) as an alternative. TFETs, with their asymmetric doping of the source and drain regions, offer improved subthreshold swing (SS) compared to conventional MOSFETs. However, despite this advantage, TFETs still suffer from ambipolar current, which increases off-state current (IOFF). This paper introduces an approach to applying hetero gate dielectrics (HGDs) in nanosheet (NS) TFETs to reduce ambipolar current characteristics. The magnitude of the drain electric field is reduced by selectively forming a high-k dielectric near the source region This configuration allows the TFETs to avoid unintended band-to-band tunneling (BTBT) and suppress ambipolar current during the off-state.
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Effect of Packing Density of Alumina Sheet on Sintering Behavior
Hee Hyun Han, Jin Sik Choe, Zee-hoon Park, Hyo-soon Shin, Dong-hun Yeo
J Korean Inst Electr Electron Mater Eng 2024;37(6):609-613.   Published online November 1, 2024
DOI: https://doi.org/10.4313/JKEM.2024.37.6.5
As the operating environment in semiconductor processes becomes demanding, research is being conducted to manufacture dense alumina substrates without defects after sintering to ensure high durability of electrostatic chucks, which are critical components in semiconductor equipment. Therefore, in this study, in order to manufacture green sheets with a high filling ratio for implementing a high-density substrate, alumina powders with average particle sizes of 2.07 μm (L) and 0.37 μm (S) were mixed in ratios of 9:1, 8:2, 7:3, and 6:4, respectively, and green sheets were manufactured and the filling ratio and sintering behavior were observed. Green sheets were fabricated by preparing a slurry using organic materials in Al2O3 powders of different particle sizes. The packing density of the green sheet mixed with L and S alumina powders with different average particle sizes in a ratio of 7:3 before and after binder burn-out showed the highest values of 3.19 g/cm3 and 2.87 g/cm3, respectively. As a result of observing the sintered density based on the mixing ratio of alumina powders revealed that the alumina sheet mixed at a 6:4 ratio of L and S powders, sintered at 1,700℃, exhibited the best sintering characteristics with a density of 3.96 g/cm³.
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Investigation of Mechanical Stability of Nanosheet FETs During Electro-Thermal Annealing
Dong-hyun Wang, Jun-young Park
J Korean Inst Electr Electron Mater Eng 2022;35(1):50-57.   Published online January 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.1.8
Reliability of CMOS has been severed under aggressive device scaling. Conventional technologies such as lightly doped drain (LDD) and forming gas annealing (FGA) have been applied for better device reliability, but further advances are modest. Alternatively, electro-thermal annealing (ETA) which utilizes Joule heat produced by electrodes in a MOSFET, has been newly introduced for gate dielectric curing. However, concerns about mechanical stability during the electro-thermal annealing, have not been discussed, yet. In this context, this paper demonstrates the mechanical stability of nanosheet FET during the electro-thermal annealing. The effect of mechanical stresses during the electro-thermal annealing was investigated with respect to device design parameters.
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A Brief Review on 2-Dimensional Dielectric Nanosheets
Haena Yim, Ji-won Choi
J Korean Inst Electr Electron Mater Eng 2022;35(1):1-10.   Published online January 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.1.1
Two-dimensional materials have shown a great promise for the next-generation electronic materials due to their unique optical, physical, and chemical properties that are distinct from their bulk counterparts. Their atomic-level thickness, the feature for flexible tenability, and exposed huge surface allow various approaches for high-performance nanoscale devices. Especially, this review highlights the recent progress on two-dimensional dielectric nanosheets, which are obtained by cheap and mass-producible solution-based exfoliation process, accompanied by the preparation methods, various deposition methods, and the characteristics of devices using a dielectric nanosheet thin films. We also present a perspective on the advantages offered by this two-dimensional dielectric nanosheets for the upcoming future nanoelectonics.
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In this study, solder joints mixed with graphene-nanosheets (GNSs) were investigated for the manufacture of highly reliable electronic devices. In order to analyze the effect of adding GNSs, experiments were performed by adding various amounts of GNSs (0.01, 0.05, 0.1, 0.3, 0.5 wt%). To compare and analyze the properties of the solder joints to which GNSs were added, shear forces were measured, and cross-sectional observation was performed. The bonding strength of the solder joints containing 0.05% GNSs was the highest, and the bonding strength of the solder joints with higher GNSs contents did not increase. This is because, as the content of GNSs increases, the viscosity of the solder paste also increases; therefore, the solder paste detachability from the metal mask was lowered and a sufficient amount was not applied. In addition, due to the high content of GNSs, the fluidity of solder powder and paste decreased, resulting in defects in the shape of the solder joint. Therefore, the optimal GNSs content in this study was 0.05%, and studies for optimal viscosity should be continued.
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Analysis of Output Characteristics of High-Power Shingled Photovoltaic Module due to Temperature Reduction
Jae Sung Bae, Jang Won Yoo, Hong Sub Jee, Jae Hyeong Lee
J Korean Inst Electr Electron Mater Eng 2020;33(6):439-444.   Published online November 1, 2020
DOI: https://doi.org/10.4313/JKEM.2021.33.6.2
An increase in the temperature of photovoltaic (PV) modules causes reduced power output and shorter lifetime. Because of these characteristics, demands for the heat dissipation of PV modules are increasing. In this study, we attached a heat dissipation sheet to the back sheet of a shingled PV module and observed the temperature changes. The PV shingled module was tested under Standard Test Conditions (STCs; irradiance: 1,000 W/m2, temperature: 25℃, air mass: 1.5) using a solar radiation tester, wherein the temperature of the PV module was measured by irradiating light for a certain duration. As a result, the temperature of the PV module with the heat dissipation sheet decreased by 3℃ compared to that without a heat dissipation sheet. This indicated that the power loss was caused by a temperature increase of the PV module. In addition, it was confirmed that the primary parameter contributing to the reduced PV module output power was the open circuit voltage (Voc).
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Characterization of AZO Thin Film by Plasma Surface Treatment
Jong-chang Woo, Gwan-ha Kim
J Korean Inst Electr Electron Mater Eng 2019;32(2):147-150.   Published online March 1, 2019
DOI: https://doi.org/10.4313/JKEM.2019.32.2.147
There is a need for the development of transparent conductive materials that are economical and environmentally friendly with exhibit low resistivity and high transmittance in the visible spectrum. In this study, the deposition rate and uniformity of Al-doped ZnO-thin films were improved by changing the Z-motion of the sputtering system. The deposition rate and the uniformity were determined to be 3.44 nm/min and 1.23%, respectively, under the 10 mm Z-motion condition. During O2 plasma treatment, the intrusion-type metal elements in the thin film were reduced, which contributed to an oxygen vacancy reduction in addition to structural stabilization. Moreover, the sheet resistance was more easily saturated.
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A Study on the Near Infrared Ray Wavelength Conversion Film for Improving Conversion Efficiency of Solar Cell
Byung Kyu Park, Gye Choon Park, Jin Lee
J Korean Inst Electr Electron Mater Eng 2017;30(11):699-704.   Published online November 1, 2017
DOI: https://doi.org/10.4313/JKEM.2017.30.11.699
The amount of electric power for photovoltaic power generation depends on the location of the power plant and the direction of solar cell. The solar cell controls the generation of solar power plants. Therefore, the structure of solar cell, manufacturing method, and optic technology were factors contributing to increased solar cell efficiency; however, the technical limit has been reached. Herein, we propose a new method to increase the solar cell efficiency using a wavelength conversion technology that converts ultraviolet and infrared rays, which are not effectively used in solar cells, into effective wavelength of solar cell. We used fluoride Na(Ca)YF4 phosphor for wavelength conversion. Then, a wavelength-conversion fluorescent paste, prepared using an organic-silicon binder, was used to prepare a film that was applied to Si solar cells. It was confirmed that conversion efficiency improved by 5% or more.
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Figure of Merit of SnO2/Ag/Nb2O5/SiO2/SnO2 Transparent Conducting Multilayer Film Deposited on Glass Substrate
Jin-gyun Kim, Sang-don Lee, Gun-eik Jang
J Korean Inst Electr Electron Mater Eng 2017;30(2):81-85.   Published online February 1, 2017
DOI: https://doi.org/10.4313/JKEM.2017.30.2.81
SnO2/Ag/Nb2O5/SiO2/SnO2 multilayer films were prepared on glass substrate by sequential using RF/DC magnetron sputtering at room temperature. The influence of top SnO2 layer thickness on optical and electrical properties of the multilayer films was investigated. Experimentally measured results exhibit transmittances over 84.3 ~ 85.8% at 550 nm wavelength. As the top SnO2 layer thickness increased from 40 to 55 nm, the sheet resistance (Rs) increased from 5.81 to 6.94 Ω/sq. The Haacke`s figure of merit (FOM) calculated for the samples with various SnO2 layer thicknesses was a maximum at 45 nm (35.3 × 10-3 Ω-1).
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Control of Explosion Behavior in Micro Hole Using UV Laser on LTCC Green Sheets Containing Carbon Particles
Shi Yeon Kim, Ik-joon Ahn, Dong-hun Yeo, Hyo-soon Shin, Ho Gyu Yoon
J Korean Inst Electr Electron Mater Eng 2016;29(12):786-790.   Published online December 1, 2016
DOI: https://doi.org/10.4313/JKEM.2016.29.12.786
Hole explosion behaviors were observed during drilling fine holes with laser beam on the LTCC green bar of 320 ㎛ thick after lamination of green sheets prepared by tape casting of thick film process. The incidence of these hole explosions was inversely proportional to hole sizes. The incidence of hole explosion was 20 % number of hole with the size of 60 ㎛ exploded for the UV radiation, while the explosion did not appear for hole sizes over 100 ㎛. To prevent hole explosion behavior during laser-drilling of fine holes, carbon black powder was added as an additive in the LTCC composition, which has superior thermal durability. As a consequence, hole explosion rate was suppressed to 0.8 % for the hole size of 50 ㎛ green sheet with the carbon black amount of 10 weight % and the laser power of 3 watt. Added carbon is thought to reduce the heat-affected region during laser drilling.
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The Effect of Packing Density on the Warpage Behavior
Shi Yeon Kim, Dong Hun Yeo, Hyo Soon Shin, Woo Chang Song, Ho Gyu Yoon
J Korean Inst Electr Electron Mater Eng 2015;28(12):781-786.   Published online December 1, 2015
DOI: https://doi.org/10.4313/JKEM.2015.28.12.781
It is necessary for ferrite sheets to be fabricated with high packing density for excellent electrical properties and high strength. In this study, the relationship between the warpage and the packing density of ferrite green sheet, was investigated with amount variation of organic additives. With 0.4 wt% of dispersant, the packing density was about 48% and warpage appeared 0.5~1.3 ㎜ high. With 1.4 wt% of dispersant, the packing density increased up to 57% and warpage appeared 0.8~2.1 ㎜ high. With high packing density, warpage appeared along the edges of specimen, while with low packing density, deformation appeared over whole specimen inhomogeneously. It is thought that inhomogeneous deformation after sintering came from the inhomogeneity in green sheet prepared with badly dispersed slurry. With good homogeneity in green sheet from well-dispersed slurry, isotropic shrinkage is thought to have occurred along the distance from center to edges of specimen during sintering.
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Regular Paper : Fabrication of TCO-less Dye-sensitized Solar Cells by Using Low Cost Ti Layer Deposited Glass Substrate
Haeng Yun Jung, Hyun Chul Ki, Hai Bon Gu
J Korean Inst Electr Electron Mater Eng 2014;27(11):725-729.   Published online November 1, 2014
DOI: https://doi.org/10.4313/JKEM.2014.27.11.725
In this study, a transparent conductive oxide (TCO)-less dye-sensitized solar cells (DSSCs)was fabricated by using titanium (Ti) electrode to replace the Fluorine-doped tin oxide (FTO) for thereduction of manufacturing cost. Ti film was formed by electron beam evaporation method and the resultsshowed the sheet resistance of Ti electrodes with a thikness of 500 nm similar to FTO. In case of powerconversion efficiency (PCE), a DSSC with Ti electrodes showed a lower value than that with FTO by0.38%. For the investigation of the difference, the DSSCs were measured and analyzed by usingelectrochemical impedance analyzer (EIS).
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Energy Materials : Addition Effects of Sheet-like Ni Nanopowder on the Electrochemical Properties of Positive Electrode in Ni-Zn Redox Flow Battery
Hye Won Seok, Sei Ki Kim, Yang Koo Kang, Yeon Woo Hong, Young Jin Lee, Beom Su Kim, Byeong Kwon Ju
J Korean Inst Electr Electron Mater Eng 2014;27(9):582-588.   Published online September 1, 2014
DOI: https://doi.org/10.4313/JKEM.2014.27.9.582
3 mol% Co-added Ni(OH)2 fine powders, which showed β-phase, as positive electrode materials have been fabricated using NiSO4;6H2O aqueous solution by ultrasonic spray-chemical precipitation and subsequent hydrothermal method, and sheet-like Ni nanopowder was fabricated by mechano-chemical reduction method. The addition effects of the sheet-like Ni nanopowder on the electrochemical properties of the positive electrode in Ni-Zn Redox flow battery were investigated. Impedance spectroscopy revealed that the addition of the sheet-like Ni nanopowder resulted in decrease in the electrical resistivity; 10 wt.% addition reduced the electrical properties by a fifth. Cyclic voltammetry showed the addition of the sheet-like Ni nanopowder resulted in decrease in the potential difference of oxidation and reduction; this means the increase in the reversability for electrode reduction. Charge/discharge measurement confirmed that the addition of the sheet-like Ni nanopowder resulted in the increase in the discharge efficiency.
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Encapsulation Method of OLED with Organic-Inorganic Protective Thin Films Sealed with Metal Sheet
Su Young Lim, Jung Hyun Seo, Sung Hoo Ju
J Korean Inst Electr Electron Mater Eng 2013;26(7):539-544.   Published online July 1, 2013
DOI: https://doi.org/10.4313/JKEM.2013.26.7.539
Abstract: To study the encapsulation method for heat dissipation of high brightness organic light emitting diode (OLEI)), red emitting OLED of ITO (150 nm) / 2 TNATA (50 rim) / NPB (30 rim) / A1q3 1 vol.% Rubrene (30 nm) / Alq3 (30 nm) / LiF (0.7 nm) / Al (200 nm) structure was fabricated, which on Alq3 (150 nm) / LiF (ISo nm) as buffer layer and Al as protective layer was deposited to protect the damage of OLED, and subsequently it was encapsulated using attaching film and metal sheet. The current density, luminance and power efficiency was improved according to thickness of Al protective layer. The emission spectrum and the Commission International de L`Eclairage (CIE) coordinate did not have any effects on encapsulation process using attaching film and metal sheet The lifetime of encapsulated OLED using attaching film and metal sheet was 307 hours in 1,200 nm Al thickness, which was increased according to thickness of Al protective layer, and was improved 7% compared with 287 hours, lifetime of encapsulated OLEI) using attaching film and flat glass. As a result, it showed the improved current density, luminance, power efficiency and the long lifetime, because the encapsulation method using attaching film and metal sheet could radiate the heat on OLED effectively.
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Physical Properties of Green Sheets According to Glass Transition Temperature of Binder
Hyeok Jung Kwon, Hyo Soon Shin, Dong Hun Yeo
J Korean Inst Electr Electron Mater Eng 2013;26(1):33-37.   Published online January 1, 2013
DOI: https://doi.org/10.4313/JKEM.2013.26.1.33
The properties of LTCC green sheets formed by the MLS-22 powder of NEG Inc. were investigated for acrylic binders with different PVB and Tg in the variation of temperature. The elongation of the green sheets showed large variation depending on the temperature, and was rapidly decreased near the Tg of the sheets. With the increase of the ratio of plasticizer/binder (P/B), large elongation of the sheets was observed due to the decrease of the Tg. In the stacking process of the multilayer ceramic, the optimal control of the temperature is highly required depending on the Tg of the binder and the ratio of P/Buniform coating.
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Ceramic Green Sheet and Sintering Properties on Solvent Mixture Rate of Electrolyte for Solid Oxide Fuel Cells Fabrication
Bong Hwa Moon, Kyung Min Lee, Kyoung Tae Lim, Chung Hwan Lee, Heun Young Lee, Jung Rag Yoon
J Korean Inst Electr Electron Mater Eng 2012;25(6):426-430.   Published online June 1, 2012
DOI: https://doi.org/10.4313/JKEM.2012.25.6.426
The properties of green sheet were investigated in order to understanding an effects of organic solvent mixture ratio for solid oxide fuel cells fabrication, The purpose of this work is to optimize the slurry condition using the design of experiment to improve green sheet properties. The elongation increased with increasing amount of binder and solvent. With increasing amount of solvent, the air permeability increased but the tensile strength decreased. The best properties of the green sheet appeared amount of the binder 17 wt%, solvent 35 wt% and powder 48 wt%. The optimum condition of green and sintered density for solid oxide fuel cells fabrication was obtained in the sample pressured at 800kgf/㎠.
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Energy Materials : A Study on Properties of CuInSe2 Thin Film by Annealing
Jung Cheul Park, Soon Nam Chu
J Korean Inst Electr Electron Mater Eng 2011;24(2):162-165.   Published online February 1, 2011
DOI: https://doi.org/10.4313/JKEM.2011.24.2.162
In this paper, CuInSe2 thin film was prepared by use of the co-evaporation method with the variation of the substrate temperature in the range of 100℃ to 400℃. The film was annealed at 300℃ for an hour in a vacuum chamber at 3×10-4 Pa. After annealing, the thin film prepared at the substrate temperatures of 100℃ and 200℃ was observed. The XRD (x-ray diffraction) pattern of sample prepared at 100℃ showed the single phase formation of CuInSe2. However, at 200℃, there was no apparent difference in the XRD pattern except a variation in the intensity of the peak. As the annealing treatment of substrate improved the crystal structure of the film, it affected to the increase of an electron mobility, resulted in an increase in conductivity and a decrease in resistance. As a results, when the substrate temperature was at 200℃ and 300℃, the sheet resistance was 1.534 n/and 1.554 n/, respectively, and the resistivity was 1.76×10-6 n·㎝ and 1.7210-6 n·㎝, respectively. From the absorption spectrum measurements, there was no variation between the before and after annealing conductions. And it means that the annealing step does not affect the thickness of the thin film.
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Energy Materials : Properties of CuInSe2 Thin Film with Various Substrate Temperatures
Jung Cheul Park, Soon Nam Chu
J Korean Inst Electr Electron Mater Eng 2010;23(11):911-914.   Published online November 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.11.911
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Energy Materials : Series Resistance Change by Partial Shading in a-Si Thin Film Photovoltaic(PV) Module
Jun Oh Shin, Tae Hee Jung, Tae Bum Kim, Sung Chul Woo, Na Ri Yun, Ki Hwan Kang, Deuk Young Han, Hyung Keun Ahn
J Korean Inst Electr Electron Mater Eng 2010;23(11):901-905.   Published online November 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.11.901
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A Study on the Phase Change Characteristics of Si-doped Ge2Sb2Te5 Thin Films for PRAM
Seung Cheol Baek, Ki Ho Song, Hyun Yong Lee
J Korean Inst Electr Electron Mater Eng 2010;23(4):261-266.   Published online April 1, 2010
DOI: https://doi.org/10.4313/JKEM.2010.23.4.261
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Electrical and Optical Properties of Semitransparent Metal Electrodes for Top-emission Organic Light-emitting Diodes
Eun Chul Shin, Hui Chul An, Tae Wan Kim
J Korean Inst Electr Electron Mater Eng 2008;21(10):938-942.   Published online October 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.10.938
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Effect of Solvent Mixture Ratio on Rheology Property of Slurry and Thickness Control of Ceramic Green Sheets
Jun Young Kim, Seung Taek Kim, Jong Chul Park, Myong Jae Yoo
J Korean Inst Electr Electron Mater Eng 2008;21(3):236-241.   Published online March 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.3.236
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Design and Fabrication Process Effects on Electrical Properties in High Capacitance Multilayer Ceramic Capacitor
J Korean Inst Electr Electron Mater Eng 2007;20(2):118-123.   Published online February 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.2.118

Citations

Citations to this article as recorded by  
  • Effect of Tm2O3addition on dielectric property of barium titanate ceramics for MLCCs
    Jin-Seong Kim, Hee-Soo Lee, Do-Won Kang, Jeong-Wook Kim
    Journal of the Korean Crystal Growth and Crystal Technology.2010; 20(1): 25.     CrossRef
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Effect of Binder Content on Physical Properties of LTCC Green Tapes
J Korean Inst Electr Electron Mater Eng 2006;19(12):1112-1117.   Published online December 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.12.1112
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Fabrication and Analysis of Multilayer Ceramic Capacitors for Medium and High Voltage
J Korean Inst Electr Electron Mater Eng 2005;18(8):685-689.   Published online August 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.8.685
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Analysis of PMOS Capacitor with Thermally Robust Molybdenium Gate
J Korean Inst Electr Electron Mater Eng 2005;18(7):594-599.   Published online July 1, 2005
DOI: https://doi.org/10.4313/JKEM.2005.18.7.594
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The Fabrication and Properties of Lead-free Transparent Dielectric Thick Films for PDP
J Korean Inst Electr Electron Mater Eng 2004;17(10):1107-1113.   Published online October 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.10.1107
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High Voltage Engineering : Dielectric Properties of XLPE/Semiconductor Sheet in Power Cables
J Korean Inst Electr Electron Mater Eng 2004;17(8):904-909.   Published online August 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.8.904
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High Voltage Engineering : Mechanical and Thermal Characteristics of XLPE/Semiconductor Sheet in Power Cables
J Korean Inst Electr Electron Mater Eng 2004;17(8):893-897.   Published online August 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.8.893
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A Study on Sb2O3 Beam Tuning and Monitoring in Antimony Implantation
Sang Yong Kim, Min Ho Choe, Nam Hun Kim, Heon Sang Jeong, Ui Gu Jang
J Korean Inst Electr Electron Mater Eng 2004;17(5):476-480.   Published online May 1, 2004
DOI: https://doi.org/10.4313/JKEM.2004.17.5.476
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