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"Polycrystalline 3C-SiC"

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"Polycrystalline 3C-SiC"

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators
Gwiy Sang Chung, Tae Won Lee
J Korean Inst Electr Electron Mater Eng 2009;22(4):314-317.   Published online April 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.4.314

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  • Silicon Carbide Thin Films for MEMS: Correlating Vapor-Phase Deposition Parameters with Material Properties and Device Performance
    Neeraj Yadav, Basit Abdul, Andrea Adami, Alvise Bagolini, Leandro Lorenzelli
    Applied Sciences.2026; 16(19): 9612.     CrossRef
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  • 1 Crossref
Fabrication of Polycrystalline SiC Doubly Clamped Beam Micro Resonators and Their Characteristics
Gwiy Sang Chung, Tae Won Lee
J Korean Inst Electr Electron Mater Eng 2009;22(4):303-306.   Published online April 1, 2009
DOI: https://doi.org/10.4313/JKEM.2009.22.4.303
  • 125 View
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Raman Scattering Characteristics of Polycrystalline 3C-SiC Thin Films deposited on AIN Buffer Layer
Gwiy Sang Chung, Kang San Kim
J Korean Inst Electr Electron Mater Eng 2008;21(6):493-498.   Published online June 1, 2008
DOI: https://doi.org/10.4313/JKEM.2008.21.6.493
  • 136 View
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Effect of Surface Treatments of Polycrystalline 3C-SiC Thin Films on Ohmic Contact for Extreme Environment MEMS Applications
J Korean Inst Electr Electron Mater Eng 2007;20(3):234-239.   Published online March 1, 2007
DOI: https://doi.org/10.4313/JKEM.2007.20.3.234
  • 127 View
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Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD
J Korean Inst Electr Electron Mater Eng 2006;19(8):732-736.   Published online August 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.8.732
  • 130 View
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