Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

Gwiy Sang Chung; Tae Won Lee

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다결정 3C-SiC 마이크로 공진기의 온도특성

정귀상, 이태원

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

Gwiy Sang Chung, Tae Won Lee

J Electr Electron Mater 2009;22(4):314-317.
Published online: April 1, 2009

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Keywords: Polycrystalline 3C-SiC, Resonator, Cantilever, Doubly clamped beam

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Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

J Electr Electron Mater. 2009;22(4):314-317. Published online April 1, 2009

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

J Electr Electron Mater. 2009;22(4):314-317. Published online April 1, 2009

Articles

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다결정 3C-SiC 마이크로 공진기의 온도특성

Temperature Characteristics of Polycrystalline 3C-SiC Micro Resonators

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