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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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극한 환경 MEMS용 옴익 접촉을 위한 다결정 3C-SiC 박막의 표면 처리 효과

정귀상, 온창민

Effect of Surface Treatments of Polycrystalline 3C-SiC Thin Films on Ohmic Contact for Extreme Environment MEMS Applications

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J Electr Electron Mater 2007;20(3):234-239.
Published online: March 1, 2007
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Effect of Surface Treatments of Polycrystalline 3C-SiC Thin Films on Ohmic Contact for Extreme Environment MEMS Applications
J Electr Electron Mater. 2007;20(3):234-239.   Published online March 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Effect of Surface Treatments of Polycrystalline 3C-SiC Thin Films on Ohmic Contact for Extreme Environment MEMS Applications
J Electr Electron Mater. 2007;20(3):234-239.   Published online March 1, 2007
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