Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD

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LPCVD로 성장된 다결정 3C-SiC 박막의 물리적 특성

정귀상, 김강산

Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD

J Electr Electron Mater 2006;19(8):732-736.
Published online: August 1, 2006

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Keywords: Polycrystalline 3C-SiC, SiC-MEMS, LPCVD, DSB

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Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD

J Electr Electron Mater. 2006;19(8):732-736. Published online August 1, 2006

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD

J Electr Electron Mater. 2006;19(8):732-736. Published online August 1, 2006

Articles

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LPCVD로 성장된 다결정 3C-SiC 박막의 물리적 특성

Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD

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