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"Impurity"

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"Impurity"

Raman Characteristics of (100) β-Gallium Oxide Single Crystal Grown by EFG Method
Yun-ji Shin, Seong-ho Cho, Woon-hyeon Jeong, Seong-min Jeong, Won-jae Lee, Si-young Bae
J Korean Inst Electr Electron Mater Eng 2022;35(6):626-630.   Published online November 1, 2022
DOI: https://doi.org/10.4313/JKEM.2022.35.6.13
A 100 mm × 50 mm-sized (100) gallium oxide (Ga2O3) single crystal ingot was successfully grown by edge-defined film-fed growth (EFG). The preferred orientation and the quality of grown Ga2O3 ingot were compatible with a commercial Ga2O3 substrate by showing strong (100) orientation behaviors and 246 arcsec in X-ray rocking curve. Raman characterization was also performed for both samples; thereby providing various Raman-active characteristics of Ga2O3 crystals. In particular, we observed Ag(5) and Ag(10) peaks of Raman active mode, directly related to the impurity of the grown Ga2O3 crystal. Hence, the comparison of the crystal quality and Raman analysis might be useful for further enhancement of Ga2O3 single crystal quality in the future.
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Analysis and Reduction of Impurity Contamination Induced by Plasma Etching on Si Surface
J Korean Inst Electr Electron Mater Eng 2006;19(12):1078-1084.   Published online December 1, 2006
DOI: https://doi.org/10.4313/JKEM.2006.19.12.1078
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Fabrication of 6H-SiC MOSFET and Digital IC
Chung W. Oh, Jae S. Choi, Ji H. Song, Jang H. Lee, Hyung G. Lee, Keun H. Park, Yeong S. Kim
J Korean Inst Electr Electron Mater Eng 2003;16(7):584-592.   Published online July 1, 2003
DOI: https://doi.org/10.4313/JKEM.2003.16.7.584
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