Fabrication of 6H-SiC MOSFET and Digital IC

Chung W. Oh; Jae S. Choi; Ji H. Song; Jang H. Lee; Hyung G. Lee; Keun H. Park; Yeong S. Kim

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6H-SiC MOSFET과 디지털 IC 제작

오충완, 최재승, 송지헌, 이장희, 이형규, 박근형, 김영석

Fabrication of 6H-SiC MOSFET and Digital IC

Chung W. Oh, Jae S. Choi, Ji H. Song, Jang H. Lee, Hyung G. Lee, Keun H. Park, Yeong S. Kim

J Electr Electron Mater 2003;16(7):584-592.
Published online: July 1, 2003

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Keywords: SiC, MOSFET, Digital circuits, Impurity activation, High temperature annealing, Laser annealing

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Fabrication of 6H-SiC MOSFET and Digital IC

J Electr Electron Mater. 2003;16(7):584-592. Published online July 1, 2003

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Fabrication of 6H-SiC MOSFET and Digital IC

J Electr Electron Mater. 2003;16(7):584-592. Published online July 1, 2003

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6H-SiC MOSFET과 디지털 IC 제작

Fabrication of 6H-SiC MOSFET and Digital IC

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