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BTMSM
WHERE t1.sid in(parameter_dbtbl_keyword '%BTMSM%') and t1.xml_status <> 99
6
results for
"BTMSM"
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Keywords
Low-k (6)
FTIR (5)
PECVD (5)
SiOCH (5)
2D-correlation analysis (3)
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Publication year
2009 (3)
2008 (3)
Authors
Hong Bae Kim (6)
Chang Su Hwang (5)
Jong Wook Kim (3)
Min Seok Kim (2)
Yong Heon Park (2)
More +
Keywords
Low-k (6)
FTIR (5)
PECVD (5)
SiOCH (5)
2D-correlation analysis (3)
BTMSM/O2 (3)
BTMSM (2)
C-V characteristics (2)
BTMSM precursor (1)
C-V characteristic (1)
ILD (1)
SiOCH film (1)
Synchronous (1)
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Hong Bae Kim (6)
Chang Su Hwang (5)
Jong Wook Kim (3)
Min Seok Kim (2)
Yong Heon Park (2)
In Cheol Park (1)
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2009 (3)
2008 (3)
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"BTMSM"
Properties of SiOCH Thin Film Low Dielectric by BTMSM/O2 Flow Rates
In Cheol Park, Hong Bae Kim
J Electr Electron Mater
2009;22(2):132-136.
Published online February 1, 2009
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An Inspection of Stability for Annealing SiOCH Thin Flim
Yong Heon Park, Min Seok Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater
2009;22(1):41-46.
Published online January 1, 2009
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Properties of Dielectric Constant and Bonding Mode of Annealed SiOCH Thin Film
Jong Wook Kim, Chang Su Hwang, Yong Heon Park, Hong Bae Kim
J Electr Electron Mater
2009;22(1):47-52.
Published online January 1, 2009
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Dielectric Characteristics through 2D-correlation Analysis of SiOCH Thin Film deposited by BTMSM/O2 High Flow Rates
Min Seok Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater
2008;21(6):544-551.
Published online June 1, 2008
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Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates
Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater
2008;21(4):354-361.
Published online April 1, 2008
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Properties of SiOCH Thin Film Dielectric constant by BTMSM/O2 Flow Rates
Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater
2008;21(4):362-367.
Published online April 1, 2008
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