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BTMSM/O2 유량변화에 따른 SiOCH 박막 결합모드의 2차원 상관관계 특성

김종욱, 황창수, 김홍배

Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates

Jong Wook Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater 2008;21(4):354-361.
Published online: April 1, 2008
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Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates
J Electr Electron Mater. 2008;21(4):354-361.   Published online April 1, 2008
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Properties of SiOCH Thin Film Bonding Mode by BTMSM/O2 Flow Rates
J Electr Electron Mater. 2008;21(4):354-361.   Published online April 1, 2008
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