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BTMSM/O2 고유량으로 증착된 SiOCH 박막의 2차원 상관관계 분석을 통한 유전특성 연구

김민석, 황창수, 김홍배

Dielectric Characteristics through 2D-correlation Analysis of SiOCH Thin Film deposited by BTMSM/O2 High Flow Rates

Min Seok Kim, Chang Su Hwang, Hong Bae Kim
J Electr Electron Mater 2008;21(6):544-551.
Published online: June 1, 2008
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Dielectric Characteristics through 2D-correlation Analysis of SiOCH Thin Film deposited by BTMSM/O2 High Flow Rates
J Electr Electron Mater. 2008;21(6):544-551.   Published online June 1, 2008
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Dielectric Characteristics through 2D-correlation Analysis of SiOCH Thin Film deposited by BTMSM/O2 High Flow Rates
J Electr Electron Mater. 2008;21(6):544-551.   Published online June 1, 2008
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