Silicon carbide (SiC), with its wide bandgap and strong resistance to radiation and thermal conditions, is a promising material for ultraviolet (UV) photodetector applications under harsh environments. In this study, porous SiC thin films with thicknesses of 20, 50, and 80 nm were fabricated on 4H-SiC substrates using aerosol deposition (AD), which enables roomtemperature film formation. The device with a 50 nm-thick film exhibited the highest photoresponse under UV-C illumination (260 nm), achieving a maximum photo-to-dark current ratio (PDCR) of 205.2, a responsivity of 0.058 A/W, an external quantum efficiency (EQE) of 27.71%, and a specific detectivity (D*) of 7.9×10¹¹ Jones. These results are attributed to an optimized balance between photon absorption and carrier transport in the porous structure. The findings confirm the potential of ADfabricated porous SiC films for highly sensitive and scalable UV photodetector applications.

Metal halide perovskites (MHPs) have attracted attention as new display materials due to their excellent optical properties, but their application is limited by the complexity of conventional synthesis methods and the film formation processes. As an alternative, color conversion film fabricated via the aerosol deposition (AD) process using CsPbBr₃/Al₂O₃ powder, a ceramic matrix-based MHP composite, has expanded the practical utility of MHPs by simplifying both the synthesis and film formation steps. Nevertheless, the hammering effect that occurs during the AD process can damage the MHP crystal structure, leading to degradation of its optical properties. Therefore, in this study, to overcome the problem of optical degradation, we compared the structural and photoluminescence (PL) properties of films fabricated by adding polytetrafluoroethylene (PTFE), a material with a buffering effect, to the CsPbBr₃/Al₂O₃ starting powder at mass ratios of 0, 0.1, 0.5, 1, and 2 wt% to mitigate the hammering effect. The film containing 1 wt% PTFE exhibited the highest PL performance, achieving a luminous efficiency of 52.1 lm/W. This improvement is attributed to PTFE providing an optimal buffering effect without forming aggregates on the film surface. These results further enhance the applicability of AD-based color conversion films and are expected to contribute to the development of high-resolution display technologies.

This study explores the realization of high-efficiency white LED lighting by applying cyan-emitting quantum dot (CQD) and red-emitting quantum dot (R-QD) deposition without any host matrix onto a yellow-emitting phosphor-in-glass (YPIG) substrate using an aerosol-assisted deposition (AAD) process. The AAD process facilitates the direct formation of densely packed QD-deposited layers on the substrate, effectively addressing challenges such as optical efficiency loss and degradation typically associated with organic host matrices. C-QD and R-QD coatings, deposited with thicknesses of 0.84 μm and 0.77 μm on the upper and lower Y-PIG substrate, exhibited robust color conversion properties. These films achieved a luminous efficacy of 77 lm/W and a high color rendering index (CRI) of 96.8 under blue light excitation. The dual-layer structure produced highquality light closely resembling natural daylight, as confirmed through real image. Consequently, the research suggests the potential of AAD-based QD deposition to achieve superior performance without relying on host matrices, offering a viable solution for high-efficiency lighting applications. Further optimization of deposition parameters and exploration of diverse substrates and QD material combinations are expected to expand the applicability of this technique in future research.

The energy demand in the world is expected to exceed 740 million TJ by 2040 and our dependence on fossil fuels needs to be switched to sustainable and renewable energy sources like solar energy. Building Integrated Photovoltaic (BIPV) is one of the best approaches to extracting solar energy. There are more than 200 BIPV products in the market currently but when it comes to integrating these products into the technical aspects such as buildings’ structural integrity, thermal, daylight retainment and aesthetic prospects to be considered. The share of BIPV integration potential of different building types in the world of residential, agricultural, industrial, commercial and other buildings account for 66%, 4.8%, 8.1%, 19.9%, and 1.2% accordingly. Many solar technologies developed to achieve architectural requirements, but the main problem is the trade-off between efficiency and aesthetic appeal, which is less than 10% in coloured and transparent solar modules. This paper discusses the different applications of solar photovoltaics (PV) in building architecture, technical requirements, and different module technologies. The article provides a comprehensive guide for researchers and designers working on the development of BIPV integrations.

Dielectric ceramic capacitors present high output power density due to the fast energy charge and discharge nature of dielectric polarization. By forming dense ceramic films with nano-grains through the Aerosol Deposition (AD) process, dielectric ceramic capacitors can have high dielectric breakdown strength, high energy storage density, and leading to high power density. Dielectric capacitors fabricated by AD process are expected to meet the increasing demand in applications that require not only high energy density but also high power output in a short time. This article reviews the recent progress on the dielectric ceramic capacitors with improved energy storage properties through AD process, including energy storage capacitors based on both leadbased and lead-free dielectric ceramics.

Energy storage capacitors based on dielectric ceramics with superior polarization properties and dielectric constant can provide much higher output power density due to their very fast energy charging/discharging rates, which are particularly suitable for operating pulsed-power devices. For an outstanding energy storage performance of dielectric capacitor, a large recoverable energy density could be derived by introducing a slim polarization-electric field hysteresis loop into dielectric materials by various technical approaches. Many research teams have explored various dielectric capacitor technologies to demonstrate high output power density and ultrafast charging/discharging behavior. This article reviews the recent research progress in high-performance dielectric capacitors for pulsed-power electronic applications.

Capacitive-type humidity sensors with a high sensitivity and fast response/recovery times have attracted a great attention in non-contact respiration biological signal monitoring applications. However, complicated fabrication processes involving high-temperature heat treatment for the hygroscopic film is essential in the conventional ceramic-based humidity sensors. In this study, a non-toxic ceramic/metal halide (BaTiO₃(BT)/NaCl) humidity sensor was prepared at room temperature using a solvent-free aerosol deposition process (AD) without any additional process. Currently prepared BT/NaCl humidity sensor shows an excellent sensitivity (245 pF/RH%) and superior response/recovery times (3s/4s) due to the NaCl ionization effect resulting in an immense interfacial polarization. Furthermore, the non-contact respiration signal variation using the BT/NaCl sensor was determined to be over 700% by maintaining the distance of 20 cm between the individual and the sensor. Through the AD-fabricated sensor in this study, we expect to develop a non-contact biological signal monitoring system that can be applied to various fields such as respiratory disease detection and management, infant respiratory signal observation, and touchless skin moisture sensing button.

Controlling ambient humid condition through high performance humidity sensors has become important for various fields, including industrial process, food storage, and the preservation of historic remains. Although aerosol deposited humidity sensors using ceramic BaTiO₃ (BT) material have been widely studied because of their longtime stability, there remain critical disadvantages, such as low sensitivity, low linearity, and slow response/recovery time in case of the sensors fabricated at room temperature. To achieve superior humidity sensing properties even at room temperature condition, BT-Cu composite films utilizing aerosol deposition (AD) process have been proposed based on the percolation theory. The BT-Cu composite films showed gradually improved sensing properties until the Cu concentration reached 15 wt% in the composite film. However, the excessive Cu (above 30 wt%) containing BT-Cu composite films showed a rapid decrease of the sensing properties. The results of observed surface morphology of the AD fabricated composite films, to figure out the metal filler effect, showed correlation between surface topography as well as size and the amount of open pores according to the metal filler content. Overall, it is very important not only dielectric constant of the humidity sensing films but also microstructures, because they affect either the variation range of capacitance by ambient humidity or adsorption/desorption of ambient humidity onto/from the humidity sensing films.

Piezoelectric ceramic fiber composite (PCFC) was fabricated using a planar electrode printed piezoelectric ceramic fiber driven in transverse mode for small-scale wind energy harvester applications. The PCFC consisted of an epoxy matrix material and piezoelectric ceramic fibers sandwiched by interdigitated electrode (IDE) patterned polyimide films. The PCFC showed an excellent mechanical performance under a continuous stress. For the fabrication of PCB cantilever harvester, five -PCFCs were vertically attached onto a flexible printed circuit board (PCB) substrate, and then PCFCs were serially connected through a printed Cu circuit. The energy harvesting performance was evaluated applying an inverted structure, which imples its free leading edge located at an open end but the trailing edge at a clamped end, to enhance strain energy in a wind tunnel. The output voltage of the PCB cantilever harvester was increased as the wind speed increased. The maximum output power was 17.2 μW at a resistance load of 200 kΩ and wind speed of 9 m/s. It is considered that the PCB cantilever energy harvester reveals a potential use for wind energy harvester applications.

Four types of BaTiO₃ powders are prepared and successfully deposited on glass and Pt/Si substrates using the aerosol deposition process. Particles with sizes of 0.45 μm and 0.3 μm are selected as the starting powder, while those powders are treated using a different milling method. The jet-milled and ball-milled powders not only showed a smaller particle-size distribution, but compared with the non-milled powder, it also had a higher deposition rate using the uniformly generated aerosol. Although the films deposited using particles with size 0.45 μm exhibited some craters on the surface, significantly flat film surfaces were obtained. However, particles with size 0.3 μm create a slightly rough film surface, but the dielectric constant was greater than in the case involving particles with size 0.45 μm. Consequently, a suitably large particle size significantly influences the deposition rate and improvement in the surface roughness, and a uniform particle size distribution appears to contribute to an improved dielectric constant. Therefore, it is believed that the dielectric properties along with the growth characteristics can be enhanced by limiting particle size and shape.

Al₂O₃ powders with particle sizes of 0.35 μm, 0.5 μm, 1.5 μm, and 2.5 μm are deposited onto glass and Cu substrates using the aerosol deposition (AD) process. The deposition characteristics of Al₂O₃ films using those four types of Al₂O₃ powders are investigated to determine the influence of the particle size on the films. To observe detailed micro-structures of the films, the cross-section and surface morphology are observed. Then, the crystalline size and internal strain are calculated from X-ray diffraction peaks in order to confirm the hammering effect as well as the micro-strain during the AD deposition. From the above results, deposition mechanisms related to the particle size are studied. The results of this study indicate the optimal particle size and formation mechanisms for dense Al₂O₃ film with a smooth surface roughness as well as for a porous Al₂O₃ film with a rough surface roughness.

Pb(Zr_0.52Ti_0.48)O₃ (PZT) films with a thickness of 5~10 μm at the morphotropic phase boundary were fabricated by aerosol-deposition (AD), and their phase evolution and electrical properties were investigated. The microstructure of the AD PZT films revealed nanosized grains with a low crystallinity and a dense structure at room temperature. The AD PZT films showed a mixture of tetragonal and rhombohedral phases. The post-annealing temperature was varied to study the phase transition behavior. The crystallinity of the AD PZT films was enhanced by annealing at 450, 550, and 650℃ for 2 h. At 650℃, the tetragonal and rhombohedral phases reacted to form a bridge phase between the two phases. The polarization-electric field hysteresis loops of the AD PZT film annealed at 650℃ exhibited a smaller cohesive field and a lower slim hysteresis than the films annealed at 450 and 550℃.

The effect of particle sizes on the aerosol deposition (AD) of Cu films is investigated in order to understand the deposition behaviors of metal powder during the AD process. The Cu coatings fabricated by using 2 μm Cu powders had a dense microstructure, a high deposition rate (1.6 ± 0.2 μm/min), and low resistance (9.42 ± 0.4 μΩ·cm) compared to that from using Cu powder with a particle size greater than 5 μm. Also, from estimating the internal micro-strain of Cu films, the Cu coatings fabricated by using 2 μm Cu particles exhibited a high micro-strain value of 3.307×10^-3. On the other hand, the strain of Cu coatings fabricated with 5 μm particles was decreased to 2.76×10^-3. These results seem to show that the impacted Cu particles are compressed and flattened by shock waves, and that their bonding is associated with the high internal micro-strain caused by plastic deformation.

This paper describes a low voltage detection circuit used in the semiconductor chips. The circuit was composed of a detection part of the CMOS structure as three stages and two inverters. The output of the low voltage detection circuit become to ‘high’ from ‘low’, when the power supply voltage falls below 80%. When the power supply voltage is 5 V, it was detected at 4 V point. The proposed low voltage detection circuit can be easily applied only by changing the resister and the capacitor without structural change in a wide range of power supply voltage.

The humans are under attack involving the hazardous environment and pathogen/biotoxin aerosol that is realistic concerned. A portable, fast, reliable, and cheap Pathogen and Biotoxin Aerosol threat Detection(PBAD) trigger is an important technology for detect-to-protect and detect-to-treat system because the man-made biological terror is a fast and lethal infection. The ultraviolet C(UVC) wavelengths light source is key issue for PBAD that is sensitive because of strong fluorescence cross section from fluorescent amino acids in proteins such as tryptophan and tyrosine. The UVC-light emitting diode(LED) is emerging light source technology as alternative to laser or lamps as they offer several advantages. This paper discussed about the design consideration of UVC-LED for the PBAD system. The UVC-LED and PBAD technology, currently available or in development, are also discussed.

In this study, in order to develop coupled vibration mode piezoelectric devices for Acoustic Emission(abbreviated as AE) sensor application with outstanding displacement and piezoelectric properties have been simulatedby ATILA FEM program. And, From the results of ATILA simulation, the AE sensor specimen, obtained superiorelectromechanical coupling factor and displacement, when the size of specimen is 3.45 mmΦ×3.45 mm with ratio ofdiameter/thickness(Φ/T)= 1.0. Therefore, AE sensor was fabricated by (Na,K,Li)(Nb,Ta) O3(abbreviated as NKL-NT)system piezoelectric ceramics using coupled vibration mode. The piezoelectric properties of NKL-NT ceramics wasexhibited that piezoelectric constant(d33), piezoelectric voltage constant(g33) and electro mechanical coupling factor(kp)have the excellent values of 261[pC/N], 40.10[10-3Vm/N], and 0.44, respectively. The manufactured piezoelectric devicewith ratio of Φ/T= 1.0 indicated the optimum values of resonant frequency(fr)= 556.5[kHz], antiresonant frequency(fa)=631.1[kHz], and effective electromechanical coupling factor(keff)= 0.473. The maximum sensitivity of the coupledvibration mode AE sensor was 55[dB] at the resonant frequency of 75[kHz]. The results show that the coupledvibration mode piezoelectric device is a promising candidate for the application AE sensor piezoelectric device.

Al2O3 films on silicon carbide were fabricated by Aerosol deposition with annealing temperatureat 800℃ and 1,000℃. The effect of thermal treatment on physical properties of Al2O3 thin films has beeninvestigated by XRD (X-ray diffraction), AFM (atomic force microscope), SEM (scanning electronmicroscope), and AES (auger electron spectroscopy). Also electrical properties have been investigated byKeithley 4,200 semiconductor parameter analyzer to explain the interface trapped charge density (Dit),flatband voltage (VFB) and leakage current (Io). Al2O3 films become crystallized with increasingtemperature by calculating full width at half maximum (FWHM) of diffraction peaks, also surfacemorphology is observed by topography measurement in non-contact mode AFM. Dit was 2.26×10-12eV-1.cm-2 at 800℃ annealed sample, which is the lowest value in all samples. Also the sample annealedat 800℃ has the lowest leakage current of 4.89×10-13 A.

Renewable energy sources such as solar, wind and hydro provides utilizing renewable power and reduce the using fossil fuels. On the other hand, it is too critical to apply power system due to the intermittent nature of renewable energy sources, the continuous fluctuations of the power load, and the storage with high energy density. Energy storage system, including pumped-hydroelectric energy storage, compressed-air energy storage, superconducting magnetic energy storage, and electrochemical devices like batteries, super capacitors and others have shown that solve some of the challenges. In this paper, were view the current state of applications of energy storage systems, and atomic layer deposition technology, graphene materials on the energy storage systems and processes.

CIGS is one of thin film solar cell and has been studied so much, because of the possibility of low price and high efficiency. Until now, co-evaporation and sputtering were typical method to prepare CIGS absorption layer, and a few company commercialized solar cell by these method. However,non-vacuum process which has been studied for long time has not been progressed, though the merit of low price. Especially, aerosol deposition method has not been reported, because it is difficult to prepare a large quantity of various CIGS powder. In this study, CIGS powder was synthesized by mechanochemical method and CIGS absorption layer was deposited by aerosol deposition method. The thickness of the CIGS layer was controlled by the number of deposition and the surface roughness of it was affected by the amount of flow gas. And, also, I-V curve of it appeared metallic property in the case of ‘as deposition’. After heat treatment in Se-rich atmosphere, the electrical property of it changed to a semiconductor. CdS and transparent conduction layer were formed by a typical method on it for solar cell. The efficiency of cell was appeared 0.19%. Though the efficiency was low because of the disharmony in the after-process, it was conformed that CIGS solar cell could be prepared by aerosol deposition.

In this study, coupled mode piezoelectric devices for AE sensor application with excellent displacement and piezoelectric characteristics were simulated using ATILA FEM program, and then fabricated. Displacements and electromechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electromechanical coupling factor were obtained when the ratio of diameter/thickness was 1.0. The piezoelectric device of ф/T= 1.0 exhibited the optimum values of fr= 406 kHz, displacement= 6.11 × 10^-8[m], k_eff= 0.648. The results show that the coupled vibration mode piezoelectric device is a promising candidate for the application of AE sensor piezoelectric device.

Aerosol deposition(AD) coating that enable fabricate films at low temperature have begun to be widely researched for the integration of ceramics as well to realize high-speed deposition rates. For application of ceramic thick film by AD to display and electronic ceramic industry, fabrication of dense structure with a no cracking is required. In this study, to fabricate dense ceramic thick film, the effect of crystal phase of starting powder was investigated. For this study, amorphous and crystalline SiO2 powders were used as starting powders. Two types of SiO2 powders were deposited on glass substrate by AD. In the case of amorphous SiO2 powder, the deposited films had extremely incompact and opaque layer, irrespective of particle size. In contrast to amorphous powder, in the case of crystalline powder, porous structure layer and dense microstructure with no cracking layer were fabricated depending on the particle size. The optimized starting powder size for dense coating layer was 1∼2 μm. The transmittance of film reached a maximum of 76% at 800 nm.

Room temperature powder spray in vacuum process, so called Aerosol deposition (AD) is a room temperature (RT) process to fabricate thick and dense ceramic films, based on collision of solid ceramic particles. This technique can provide crack-free dense thin and thick films with thicknesses ranging from sub micrometer to several hundred micrometers with very fast deposition rates at RT. In addition, this technique is using solid particles to form the ceramic films at RT, thus there is few limitation of the substrate and easy to control the compositions of the films. In this article, we review the progress made in synthesis of piezoelectric thin/thick films, multi-layer structures, NTC thermistor thin/thick films, oxide electrode thin films for actuators or sensor applications by AD at Korea Institute of Materials Science (KIMS) during the last 4 years.

In this study, thickness vibration mode piezoelectric devices for AE sensor application were simulated using ATILA FEM program, and then fabricated. Trajectory resonant displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electro mechanical coupling factor was obtained when the ratio of diameter/thickness(Ф/T) was 0.75. The piezoelectric device of Ф/T=0.75 exhibited the optimum values of fr=183 kHz, displacement=4.44×10(-7)[m], k33=0.69, which were suitable for the application of AE sensor piezoelectric device.

In this study, thickness shear mode piezoelectric devices for AE sensor with excellent displacement and sensitivity characteristics were simulated using ATILA FEM program, and then fabricated. Displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electromechanical coupling factor was obtained when the ratio of Length/Thickness was 1. The piezoelectric device of L/T=1 exhibited the optimum values of fr=150 kHz, displacement= 6.23×10(-8)[m], k15= 0.598. The results show that the thickness shear mode piezoelectric device is a promising candidate for the application of AE sensor piezoelectric device.

Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

Abstract: Carbon aerogels are promising materials as electrodes for electrical double layer capacitors (EDLCs). An optimum process is presented for synthesis of nanoporous carbon aerogels via pyrolyzing resorcinol-formaldehyde (RF) organic aerogels, which could be cost-effectively manufactured from RF wet gels. The major reactions between resorcinol and formaldehyde include an addition reaction to form hydroxymethyl derivatives (-CH(2)OH), and then a condensation reaction of the hydroxymethyl derivatives (-CH(2)-)- and methylene ether (-CH(2)OCH(2)-) bridged compounds. The textural properties of carbon aerogels obtained were characterized by nitrogen adsorption/desorption analysis and SEM and TEM. The application of the resultant carbon for electrodes of electric double layers capacitor (EDLC) in organic TEABF4/ACN electrolyte indicated that the ESR, as low as 55 mΩ, was smaller than for commercially activated carbons. And EDLC with carbon Aerogel electrodes has an excellent stable more than for commercially activated carbons.