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나노급 CMOSFET을 위한 니켈-코발트 합금을 이용한 니켈-실리사이드의 열안정성 개선

박기영, 정순연, 한인식, 장잉잉, 종준, 이세광, 이가원, 왕진석, 이희덕

Thermal Stability Improvement of Ni-Suicide using Ni-Co alloy for Nano-scale CMOSFET

, , , , , , , ,
J Electr Electron Mater 2008;21(1):18-22.
Published online: January 1, 2008
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Thermal Stability Improvement of Ni-Suicide using Ni-Co alloy for Nano-scale CMOSFET
J Electr Electron Mater. 2008;21(1):18-22.   Published online January 1, 2008
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Thermal Stability Improvement of Ni-Suicide using Ni-Co alloy for Nano-scale CMOSFET
J Electr Electron Mater. 2008;21(1):18-22.   Published online January 1, 2008
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