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이온 빔 스퍼터법에 의한 BSCCO 박막의 순차 증착

박용필, 이준웅

Layer-by-layer Deposition of BSCCO Thin Films Using Ion Beam Sputtering Method

Yong Pil Park, Joon Ung Lee
J Electr Electron Mater 1998;11(4):334-339.
Published online: April 1, 1998
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Layer-by-layer Deposition of BSCCO Thin Films Using Ion Beam Sputtering Method
J Electr Electron Mater. 1998;11(4):334-339.   Published online April 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Layer-by-layer Deposition of BSCCO Thin Films Using Ion Beam Sputtering Method
J Electr Electron Mater. 1998;11(4):334-339.   Published online April 1, 1998
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