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더블 게이트 구조 적용에 따른 IGZO TFT 특성 분석

김지원, 박기찬, 김용상, 전재홍

Analysis of the Output Characteristics of IGZO TFT with Double Gate Structure

Ji Won Kim, Kee Chan Park, Yong Sang Kim, Jae Hong Jeon
J Electr Electron Mater 2020;33(4):281-285.
Published online: July 1, 2020
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Oxide semiconductor devices have become increasingly important because of their high mobility and good uniformity. The channel length of oxide semiconductor thin film transistors (TFTs) also shrinks as the display resolution increases. It is well known that reducing the channel length of a TFT is detrimental to the current saturation because of drain-induced barrier lowering, as well as the movement of the pinch-off point. In an organic light-emitting diode (OLED), the lack of current saturation in the driving TFT creates a major problem in the control of OLED current. To obtain improved current saturation in short channels, we fabricated indium gallium zinc oxide (IGZO) TFTs with single gate and double gate structures, and evaluated the electrical characteristics of both devices. For the double gate structure, we connected the bottom gate electrode to the source electrode, so that the electric potential of the bottom gate was fixed to that of the source. We denote the double gate structure with the bottom gate fixed at the source potential as the BGFP (bottom gate with fixed potential) structure. For the BGFP TFT, the current saturation, as determined by the output characteristics, is better than that of the conventional single gate TFT. This is because the change in the source side potential barrier by the drain field has been suppressed.

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Analysis of the Output Characteristics of IGZO TFT with Double Gate Structure
J Electr Electron Mater. 2020;33(4):281-285.   Published online July 1, 2020
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Analysis of the Output Characteristics of IGZO TFT with Double Gate Structure
J Electr Electron Mater. 2020;33(4):281-285.   Published online July 1, 2020
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