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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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전자기 유도가열식 단결정 성장로의 온도 구배제어에 있어 복사열 전달의 효과

박태용, 신윤지, 하민탄, 배시영, 임영수, 정성민

Effect of Radiation Heat Transfer on the Control of Temperature Gradient in the Induction Heating Furnace for Growing Single Crystals

Tae-yong Park, Yun-ji Shin, Minh-tan Ha, Si-young Bae, Young-soo Lim, Seong-min Jeong
J Electr Electron Mater 2019;32(6):522-527.
Published online: November 1, 2019
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In order to fabricate high-quality SiC substrates for power electronic devices, various single crystal growing methods were prepared. These include the physical vapor transport (PVT) and top seeded solution growth (TSSG) methods. All the suggested SiC growth methods generally use induction-heating furnaces. The temperature distribution in this system can be easily adjusted by changing the hot-zone design. Moreover, precise temperature control in the induction-heating furnace is favorably required to grow a high-quality crystal. Therefore, in this study, we analyzed the heat transfer in these furnaces to grow SiC crystals. As the growth temperature of SiC crystals is very high, we evaluated the effect of radiation heat transfer on the temperature distribution in induction-heating furnaces. Based on our simulation results, a heat transfer strategy that controls the radiation heat transfer was suggested to obtain the optimal temperature distribution in the PVT and TSSG methods.

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Effect of Radiation Heat Transfer on the Control of Temperature Gradient in the Induction Heating Furnace for Growing Single Crystals
J Electr Electron Mater. 2019;32(6):522-527.   Published online November 1, 2019
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
Effect of Radiation Heat Transfer on the Control of Temperature Gradient in the Induction Heating Furnace for Growing Single Crystals
J Electr Electron Mater. 2019;32(6):522-527.   Published online November 1, 2019
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