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RF 마그네트론 스퍼터링법으로 제조한 YBa2Cu3O7-x 초전도체 박막의 특성에 대한 기판의 영향

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Substrate Effects on the Characteristics of YBa2Cu3O7-x Thin Films Prepared by RF Magnetron Sputtering

Hyun Yong Shin, Chang Yub Park
J Electr Electron Mater 1995;8(1):6-11.
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Substrate Effects on the Characteristics of YBa2Cu3O7-x Thin Films Prepared by RF Magnetron Sputtering
J Electr Electron Mater. 1995;8(1):6-11.
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Substrate Effects on the Characteristics of YBa2Cu3O7-x Thin Films Prepared by RF Magnetron Sputtering
J Electr Electron Mater. 1995;8(1):6-11.
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