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IC 용 초정밀 박막저항소자의 제조와 특성연구

하홍주, 장두진, 조정수, 박정후

Preparation of Precision Thin Film Resistor Sputtered by Magnetron

Hong Ju Ha, Du Jin Jang, Jung Soo Cho, Chung Hoo Park
J Electr Electron Mater 1995;8(1):13-19.
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Preparation of Precision Thin Film Resistor Sputtered by Magnetron
J Electr Electron Mater. 1995;8(1):13-19.
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Preparation of Precision Thin Film Resistor Sputtered by Magnetron
J Electr Electron Mater. 1995;8(1):13-19.
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