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플라스틱 기판에 증착한 ZnO:AI 박막의 특성에 미치는 스퍼터 압력 효과

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Effects of Sputter Pressure on the Properties of Sputtered ZnO:AI Films Deposited on Plastic Substrate

Jae Hyeong Lee
J Electr Electron Mater 2009;22(3):277-283.
Published online: March 1, 2009
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Effects of Sputter Pressure on the Properties of Sputtered ZnO:AI Films Deposited on Plastic Substrate
J Electr Electron Mater. 2009;22(3):277-283.   Published online March 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Effects of Sputter Pressure on the Properties of Sputtered ZnO:AI Films Deposited on Plastic Substrate
J Electr Electron Mater. 2009;22(3):277-283.   Published online March 1, 2009
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