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Sol - gel 법과 급속 열처리에 의한 PZT 강유전 박막의 제작과 그 특성

백동수, 최형욱, 김준한, 신현용, 김규수, 박창엽

Fabrication and Characteristics of PZT Ferroelectric Thin Films by Sol - Gel Processing and Rapid Thermal Annealing

Dong Soo Paik, Hyung Wook Choi, Jun Han Kim, Hyun Yong Shin, Kyu Soo Kim, Chang Yub Park
J Electr Electron Mater 1994;7(5):369-375.
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Fabrication and Characteristics of PZT Ferroelectric Thin Films by Sol - Gel Processing and Rapid Thermal Annealing
J Electr Electron Mater. 1994;7(5):369-375.
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Fabrication and Characteristics of PZT Ferroelectric Thin Films by Sol - Gel Processing and Rapid Thermal Annealing
J Electr Electron Mater. 1994;7(5):369-375.
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