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저온공정을 이용한 AIN 박막의 우선배향성과 모폴로지에 관한 연구

오수영, 김응권, 이태용, 강현일, 유현규, 송준태

The Preferrde Orientation and Morphology Characteristics of AIN Thin Films Prepared by RF Power Under Room Temperature Process

Su Young Oh, Eung Kwon Kim, Tae Young Lee, Hyun Il Kang, Hyun Kyu Yu, Joon Tae Song
J Electr Electron Mater 2008;21(5):458-462.
Published online: May 1, 2008
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The Preferrde Orientation and Morphology Characteristics of AIN Thin Films Prepared by RF Power Under Room Temperature Process
J Electr Electron Mater. 2008;21(5):458-462.   Published online May 1, 2008
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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The Preferrde Orientation and Morphology Characteristics of AIN Thin Films Prepared by RF Power Under Room Temperature Process
J Electr Electron Mater. 2008;21(5):458-462.   Published online May 1, 2008
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