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Nano-technology에 도입된 Dual Poly Gate에서의 DPN 공정 연구

김창집, 노용한

Impact of DPN on Deep Nano-technology Device Employing Dual Poly Gate

Chang Jib Kim, Yong Han Roh
J Electr Electron Mater 2008;21(4):296-299.
Published online: April 1, 2008
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Impact of DPN on Deep Nano-technology Device Employing Dual Poly Gate
J Electr Electron Mater. 2008;21(4):296-299.   Published online April 1, 2008
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Impact of DPN on Deep Nano-technology Device Employing Dual Poly Gate
J Electr Electron Mater. 2008;21(4):296-299.   Published online April 1, 2008
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