Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories

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테라비트급 나노 스케일 SONOS 플래시 메모리 제작 및 소자 특성 평가

김주연, 김문경, 김병철, 김정우, 서광열

Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories

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J Electr Electron Mater 2007;20(12):1017-1021.
Published online: December 1, 2007

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Keywords: Charge trapping SONOS memory, Nano scaled non-volatile memory, SSL-NOR array

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Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories

J Electr Electron Mater. 2007;20(12):1017-1021. Published online December 1, 2007

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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bib — For JabRef, BibDesk, and other BibTeX-specific software

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Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories

J Electr Electron Mater. 2007;20(12):1017-1021. Published online December 1, 2007

Articles

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테라비트급 나노 스케일 SONOS 플래시 메모리 제작 및 소자 특성 평가

Fabrication and Device Performance of Tera Bit Level Nano-scaled SONOS Flash Memories

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