Fabrication and Characterization of Thermal Probe Array on SOI Substrates

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SOI 기판을 이용한 Thermal Probe 어레이 제작 및 특성 평가

조주현, 나기열, 박근형, 이재봉, 김영석

Fabrication and Characterization of Thermal Probe Array on SOI Substrates

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J Electr Electron Mater 2005;18(11):990-995.
Published online: November 1, 2005

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Keywords: SPM, AFM, Thermal probe array, Nano-scaled memory, MEMS

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Fabrication and Characterization of Thermal Probe Array on SOI Substrates

J Electr Electron Mater. 2005;18(11):990-995. Published online November 1, 2005

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Fabrication and Characterization of Thermal Probe Array on SOI Substrates

J Electr Electron Mater. 2005;18(11):990-995. Published online November 1, 2005

Articles

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SOI 기판을 이용한 Thermal Probe 어레이 제작 및 특성 평가

Fabrication and Characterization of Thermal Probe Array on SOI Substrates

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