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RF 마그네트론 스퍼터링법으로 성장시킨 0.5% Ce-doped Ba(Zr0.2Ti0.8)O3 (BCZT) 박막의 열처리 특성분석

최원석, 박용섭, 이준신, 홍병유

Characterization of the Annealing Effect of 0.5 % Ce-doped Ba(Zr0.2Ti0.8)O3 Thin Films Grown by RF Magnetron Sputtering Method

Won Seok Choi, Yang Seob Perk, Jun Sin Yi, Byung You Hong
J Electr Electron Mater 2003;16(5):361-364.
Published online: May 1, 2003
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Characterization of the Annealing Effect of 0.5 % Ce-doped Ba(Zr0.2Ti0.8)O3 Thin Films Grown by RF Magnetron Sputtering Method
J Electr Electron Mater. 2003;16(5):361-364.   Published online May 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Characterization of the Annealing Effect of 0.5 % Ce-doped Ba(Zr0.2Ti0.8)O3 Thin Films Grown by RF Magnetron Sputtering Method
J Electr Electron Mater. 2003;16(5):361-364.   Published online May 1, 2003
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