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센서 , 기능성박막 : 스퍼터링으로 증착된 바나듐 산화막의 구조적 , 광학적 , 전기적 특성에 미치는 산소 분압의 효과

최복길, 최창규, 권광호, 김성진, 이규대

Sensor , Thin Film : Effect of Oxygen Partial Pressure on the Structural , Optical and Electrical Properties of Sputter - deposited Vanadium Oxide Thin Films

Bok Gil Choi, Chang Kyu Choi, Kwang Ho Kwon, Sung Jin Kim, Kyu Tae Lee
J Electr Electron Mater 2001;14(12):1008-1015.
Published online: December 1, 2001
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Sensor , Thin Film : Effect of Oxygen Partial Pressure on the Structural , Optical and Electrical Properties of Sputter - deposited Vanadium Oxide Thin Films
J Electr Electron Mater. 2001;14(12):1008-1015.   Published online December 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Sensor , Thin Film : Effect of Oxygen Partial Pressure on the Structural , Optical and Electrical Properties of Sputter - deposited Vanadium Oxide Thin Films
J Electr Electron Mater. 2001;14(12):1008-1015.   Published online December 1, 2001
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