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센서 , 기능성박막 : Au / Ta2O5 / Pt MIM Capacitor 의 annealing 과 유전 특성

김인성, 정순종, 송재성, 윤문수, 박정후

Sensor , Thin Film : A Study on the Dielectric and Annealing Properties in Au / Ta2O5 / Pt MIM Capacitor

In Sung Kim, Soon Jong Jeong, Jae Sung Song, Moon Soo Yun, Chung Hoo Park
J Electr Electron Mater 2001;14(12):1016-1022.
Published online: December 1, 2001
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Sensor , Thin Film : A Study on the Dielectric and Annealing Properties in Au / Ta2O5 / Pt MIM Capacitor
J Electr Electron Mater. 2001;14(12):1016-1022.   Published online December 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Sensor , Thin Film : A Study on the Dielectric and Annealing Properties in Au / Ta2O5 / Pt MIM Capacitor
J Electr Electron Mater. 2001;14(12):1016-1022.   Published online December 1, 2001
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