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반도체 ( Semiconductor ) : 인가 바이어스 조건이 전기화학적 식각정지 특성에 미치는 영향

정귀상, 강경두, 김태송, 이원재, 송재성

Effects of Applied Bias Conditions on Electrochemical Etch - stop Characteristics

Gwiy Sang Chung, Kyung Doo Kang, Tae Song Kim, Won Jae Lee, Jae Sung Song
J Electr Electron Mater 2001;14(4):263-268.
Published online: April 1, 2001
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Effects of Applied Bias Conditions on Electrochemical Etch - stop Characteristics
J Electr Electron Mater. 2001;14(4):263-268.   Published online April 1, 2001
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Effects of Applied Bias Conditions on Electrochemical Etch - stop Characteristics
J Electr Electron Mater. 2001;14(4):263-268.   Published online April 1, 2001
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