Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Semiconductor The Study of Etching Characteristic in SrBi2Ta2O9 Thin Film by Optical Emission Spectroscopy
J Electr Electron Mater. 2001;14(3):185-189. Published online March 1, 2001
