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반도체 : 단결정 6 H-SiC 의 광전화학습식식각에 대한 연구

송정균, 정두찬, 신무환

Study on Photoelectrochemical Etching of Single Crystal 6H-SiC

Jung Gyun Song, Doo Chan Jung, Moo Whan Shin
J Electr Electron Mater 2001;14(2):117-122.
Published online: February 1, 2001
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Study on Photoelectrochemical Etching of Single Crystal 6H-SiC
J Electr Electron Mater. 2001;14(2):117-122.   Published online February 1, 2001
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Study on Photoelectrochemical Etching of Single Crystal 6H-SiC
J Electr Electron Mater. 2001;14(2):117-122.   Published online February 1, 2001
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