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SiN mask
WHERE t1.sid in(parameter_dbtbl_keyword '%SiN mask%') and t1.xml_status <> 99
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"SiN mask"
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(102) FWHM (2)
Metal organic chemical vapor deposition (2)
MOCVD (2)
SiN mask (2)
TD density (2)
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2005 (2)
Keywords
(102) FWHM (2)
Metal organic chemical vapor deposition (2)
MOCVD (2)
SiN mask (2)
TD density (2)
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"SiN mask"
A Study of Properties of GaN and LED Grown using In-situ SiN Mask
J Electr Electron Mater
2005;18(10):945-949.
Published online October 1, 2005
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A Study of Properties of GaN grown using In-situ SiN Mask by MOCVD
J Electr Electron Mater
2005;18(6):582-586.
Published online June 1, 2005
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