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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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"SiC-MEMS"

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"SiC-MEMS"

Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor
J Electr Electron Mater 2007;20(2):156-161.   Published online February 1, 2007
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Physical Characteristics of Polycrystalline 3C-SiC Thin Films Grown by LPCVD
J Electr Electron Mater 2006;19(8):732-736.   Published online August 1, 2006
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Direct Bonding Characteristics of 2˝ 3C-SiC Wafers for Harsh Environment MEMS Applications
Gwi Sang Jeong
J Electr Electron Mater 2003;16(8):700-704.   Published online August 1, 2003
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