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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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HMDS 단일 전구체를 이용한 다결정 3C-SiC 박막 성장

정귀상, 김강산, 한기봉

Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor

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J Electr Electron Mater 2007;20(2):156-161.
Published online: February 1, 2007
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Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor
J Electr Electron Mater. 2007;20(2):156-161.   Published online February 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
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Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor
J Electr Electron Mater. 2007;20(2):156-161.   Published online February 1, 2007
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