Skip to main navigation
Skip to main content
KIEEME
mobile search button
mobile menu button
Search
Advanced Search
ABOUT
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
E-SUBMISSION
Article Template
ABOUT
Journal introduction
Aims and scope
Editorial board
Management team
Best practice
Subscription information
Contact us
BROWSE ARTICLES
All issues
Current issue
Most viewed
Most downloaded
Most cited
Search
Metrics
EDITORIAL POLICIES
Research ethics
Peer review policy
Copyright and open access policy
Article sharing policy
Archiving policy
Data sharing policy
Preprint policy
Crossmark policy
Advertising and sponsorship policy
Research misconduct-related regulations
FOR CONTRIBUTORS
Instructions for authors
Checklist
Copyright transfer agreement
Graphical abstract
Page Path
HOME
Search
SOA
WHERE t1.sid in(parameter_dbtbl_keyword '%SOA%') and t1.xml_status <> 99
2
results for
"SOA"
Filter
Keywords
1GBT (1)
Chemical vapor deposition (1)
On-state voltage drop (1)
PIN-PNP model (1)
SiH4 soak (1)
More +
Publication year
2008 (1)
2003 (1)
Authors
Ey Goo Kang (1)
Sang Yong Kim (1)
Sin Su Kyoung (1)
Woo Sun Lee (1)
Jong Seok Lee (1)
More +
Keywords
1GBT (1)
Chemical vapor deposition (1)
On-state voltage drop (1)
PIN-PNP model (1)
SiH4 soak (1)
SOA (1)
Ti/TIN barrier metal (1)
Trench (1)
Tungsten (W) plug (1)
Turn -Off time (1)
Via contact resistance (1)
WF6 attack (1)
Cancel
Close
authors
Ey Goo Kang (1)
Sang Yong Kim (1)
Sin Su Kyoung (1)
Woo Sun Lee (1)
Jong Seok Lee (1)
Jin Seung Park (1)
Yong Jin Seo (1)
Man Young Sung (1)
Cancel
Close
Publication Year
2008 (1)
2003 (1)
Cancel
Close
Funded articles
Cancel
Close
"SOA"
A Study on the 1,700 V Rated NPT Trench 1GBT Analysis by PIN Diode-PNP Transistor Model
Jong Seok Lee, Sin Su Kyoung, Ey Goo Kang, Man Young Sung
J Korean Inst Electr Electron Mater Eng
2008;21(10):889-895.
Published online October 1, 2008
DOI:
https://doi.org/10.4313/JKEM.2008.21.10.889
PDF
50
View
0
Download
SIH4 Soak Effects in the W plug CVD Process
Woo Sun Lee, Yong Jin Seo, Sang Yong Kim, Jin Seung Park
J Korean Inst Electr Electron Mater Eng
2003;16(1):1-4.
Published online January 1, 2003
DOI:
https://doi.org/10.4313/JKEM.2003.16.1.001
PDF
49
View
0
Download
First
Prev
Page
of 1
Next
Last
×
TOP
First
Prev
