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SOA
WHERE t1.sid in(parameter_dbtbl_keyword '%SOA%') and t1.xml_status <> 99
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1GBT (1)
Chemical vapor deposition (1)
On-state voltage drop (1)
PIN-PNP model (1)
SiH4 soak (1)
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1GBT (1)
Chemical vapor deposition (1)
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PIN-PNP model (1)
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"SOA"
A Study on the 1,700 V Rated NPT Trench 1GBT Analysis by PIN Diode-PNP Transistor Model
Jong Seok Lee, Sin Su Kyoung, Ey Goo Kang, Man Young Sung
J Electr Electron Mater
2008;21(10):889-895.
Published online October 1, 2008
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SIH4 Soak Effects in the W plug CVD Process
Woo Sun Lee, Yong Jin Seo, Sang Yong Kim, Jin Seung Park
J Electr Electron Mater
2003;16(1):1-4.
Published online January 1, 2003
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