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Photoresist
WHERE t1.sid in(parameter_dbtbl_keyword '%Photoresist%') and t1.xml_status <> 99
5
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Photoresist (4)
Ozone (2)
Photosensitivity (2)
Thermal stability (2)
Acid amplifier (1)
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2010 (1)
2007 (1)
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Authors
Tae Kyung Ha (1)
Gwan Ha Kim (1)
Chang Il Kim (1)
Jong Chang Woo (1)
Keywords
Photoresist (4)
Ozone (2)
Photosensitivity (2)
Thermal stability (2)
Acid amplifier (1)
Acid-amplifier (1)
ArF excimer laser(193 nm) (1)
DIO3 (1)
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HF cleaning (1)
LCD TFT array (1)
Photoresist mask removing (1)
Plasma etching (1)
PR strip (1)
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Silicon etching (1)
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"Photoresist"
Removal of Photoresist Mask after the Cl2/HBr/CF4 Reactive Ion Silicon Etching
Tae Kyung Ha, Jong Chang Woo, Gwan Ha Kim, Chang Il Kim
J Electr Electron Mater
2010;23(5):353-357.
Published online May 1, 2010
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A Study on the Realization of the High Efficiency LCD Photoresist Removal Technology
J Electr Electron Mater
2007;20(11):977-982.
Published online November 1, 2007
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6
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Effect of Aromatic Acid Amplifier, 2-hydroxy-2`-tosyloxy Biphenyl, on the kind of Resist Resins
J Electr Electron Mater
2005;18(6):499-505.
Published online June 1, 2005
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A Study on Photoresist Strip Process using DIO3
J Electr Electron Mater
2004;17(11):1143-1148.
Published online November 1, 2004
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5
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Synthesis and Characterization of Novel Acid Amplifiers with a Low Absorbance at 193 nm
J Electr Electron Mater
2004;17(8):806-811.
Published online August 1, 2004
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