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193nm에서 낮은 흡수도를 갖는 새로운 산 증식제의 합성 및 특성연구

소진호, 정용석, 최상준, 정연태

Synthesis and Characterization of Novel Acid Amplifiers with a Low Absorbance at 193 nm

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J Electr Electron Mater 2004;17(8):806-811.
Published online: August 1, 2004
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Synthesis and Characterization of Novel Acid Amplifiers with a Low Absorbance at 193 nm
J Electr Electron Mater. 2004;17(8):806-811.   Published online August 1, 2004
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Synthesis and Characterization of Novel Acid Amplifiers with a Low Absorbance at 193 nm
J Electr Electron Mater. 2004;17(8):806-811.   Published online August 1, 2004
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