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센서 기능성 박막 : 크롬질화박막형 스트레인 게이지의 특성

정귀상, 서정환, 박진성

The Characteristics of Chromium Nitride Thin - Film Strain Gauges

Gwiy Sang Chung, Jeong Hwan Seo, Chin Sung Park
J Electr Electron Mater 1999;12(7):618-623.
Published online: July 1, 1999
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The Characteristics of Chromium Nitride Thin - Film Strain Gauges
J Electr Electron Mater. 1999;12(7):618-623.   Published online July 1, 1999
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The Characteristics of Chromium Nitride Thin - Film Strain Gauges
J Electr Electron Mater. 1999;12(7):618-623.   Published online July 1, 1999
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