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센서 기능성 박막 : 펄스 레이저 증착법을 이용한 내마모성 DLC 박막의 제작 및 특성분석

심경석, 이상렬

Deposition and characterization of tribologic DLC thin films fabricated by pulsed laser deposition

Kyung Suk Shim, Sang Yeol Lee
J Electr Electron Mater 1999;12(5):456-461.
Published online: May 1, 1999
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Deposition and characterization of tribologic DLC thin films fabricated by pulsed laser deposition
J Electr Electron Mater. 1999;12(5):456-461.   Published online May 1, 1999
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Deposition and characterization of tribologic DLC thin films fabricated by pulsed laser deposition
J Electr Electron Mater. 1999;12(5):456-461.   Published online May 1, 1999
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