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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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기계적 손상에 의한 실리콘 웨이퍼의 반송자 수명과 표면 거칠기와의 관계

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Relationships between Carrier Lifetime and Surface Roughness on Silicon Wafer by Mechanical Damage

Chi Young Choi, Sang Hee Cho
J Electr Electron Mater 1999;12(1):27-34.
Published online: January 1, 1999
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Relationships between Carrier Lifetime and Surface Roughness on Silicon Wafer by Mechanical Damage
J Electr Electron Mater. 1999;12(1):27-34.   Published online January 1, 1999
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Relationships between Carrier Lifetime and Surface Roughness on Silicon Wafer by Mechanical Damage
J Electr Electron Mater. 1999;12(1):27-34.   Published online January 1, 1999
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