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RF 스퍼터링법에 의한 (Sr1-xCax)TiO3 세라믹 박막의 미세구조 및 유전특성

김진사, 오재한, 이준웅

Microstructure and Dielectric Properties of (Sr1-xCax)TiO3 Ceramic Thin Film by RF Sputtering Method

Jin Sa Kim, Jae Han Oh, Joon Ung Lee
J Electr Electron Mater 1998;11(11):984-989.
Published online: November 1, 1998
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Microstructure and Dielectric Properties of (Sr1-xCax)TiO3 Ceramic Thin Film by RF Sputtering Method
J Electr Electron Mater. 1998;11(11):984-989.   Published online November 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Microstructure and Dielectric Properties of (Sr1-xCax)TiO3 Ceramic Thin Film by RF Sputtering Method
J Electr Electron Mater. 1998;11(11):984-989.   Published online November 1, 1998
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