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마이크로웨이브 플라즈마 화학기상성장법에 의한 다이아몬드 박막의 합성에 관한 연구

이병수, 이상희, 박상현, 유도현, 이백수, 이덕출

A Study on the Diamond Thin Films Synthesized by Microwave Plasma Enhanced Chemical Vapor Deposition

Byoung Soo Lee, Sang Hee Lee, Sang Hyun Park, Do Hyun You, Beak Su Lee, Duck Chool Lee
J Electr Electron Mater 1998;11(10):809-814.
Published online: October 1, 1998
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A Study on the Diamond Thin Films Synthesized by Microwave Plasma Enhanced Chemical Vapor Deposition
J Electr Electron Mater. 1998;11(10):809-814.   Published online October 1, 1998
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A Study on the Diamond Thin Films Synthesized by Microwave Plasma Enhanced Chemical Vapor Deposition
J Electr Electron Mater. 1998;11(10):809-814.   Published online October 1, 1998
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