Preparation of Co-Cr Thin Films by Facing Targets Sputtering

Kyung Hwan Kim; Min Jong Keum; Sok Hyun Kong; In Hwan Son; Sung Min Choi; S . Nakagawa; M . Naoe

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대향타겟스퍼터링에 의한 Co-Cr 박막의 제작

김경환, 금민종, 공석현, 손인환, 최성민, 중천무수, 직강정언

Preparation of Co-Cr Thin Films by Facing Targets Sputtering

Kyung Hwan Kim, Min Jong Keum, Sok Hyun Kong, In Hwan Son, Sung Min Choi, S . Nakagawa, M . Naoe

J Electr Electron Mater 1998;11(5):418-422.
Published online: May 1, 1998

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Preparation of Co-Cr Thin Films by Facing Targets Sputtering

J Electr Electron Mater. 1998;11(5):418-422. Published online May 1, 1998

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Preparation of Co-Cr Thin Films by Facing Targets Sputtering

J Electr Electron Mater. 1998;11(5):418-422. Published online May 1, 1998

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대향타겟스퍼터링에 의한 Co-Cr 박막의 제작

Preparation of Co-Cr Thin Films by Facing Targets Sputtering

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