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Polycide 구조로 저압화학증착된 WSix 박막의 열처리에 따른 거동

이재호, 임호빈, 이종무

Effects of Annealing on the Properties of WSix Films in Ploycide Structure Formed by LPCVD Method

Jae Ho Lee, Ho Bin Im, Chong Mu Lee
J Electr Electron Mater 1990;3(4):263-269.
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Effects of Annealing on the Properties of WSix Films in Ploycide Structure Formed by LPCVD Method
J Electr Electron Mater. 1990;3(4):263-269.
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Effects of Annealing on the Properties of WSix Films in Ploycide Structure Formed by LPCVD Method
J Electr Electron Mater. 1990;3(4):263-269.
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