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고상 결정화에 의해 제작된 다결정 실리콘 박막의 특성 연구

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A study on the characteristics of polycrystalline silicon thin films prepared by solid phase crystallization

Yong Sang Kim
J Electr Electron Mater 1997;10(8):794-799.
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A study on the characteristics of polycrystalline silicon thin films prepared by solid phase crystallization
J Electr Electron Mater. 1997;10(8):794-799.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A study on the characteristics of polycrystalline silicon thin films prepared by solid phase crystallization
J Electr Electron Mater. 1997;10(8):794-799.
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