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Magnetron sputtering 으로 증착한 ZnO 박막의 특성과 열처리에 따른 비저항과 미세구조

이승환, 성영권, 김종관

A properties of ZnO thin film deposited by magnetron sputtering and its resistivity and microstructure due to annealing

Seung Hwan Yi, Yong Kwon Sung, Jong Kwan Kim
J Electr Electron Mater 1997;10(2):126-133.
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A properties of ZnO thin film deposited by magnetron sputtering and its resistivity and microstructure due to annealing
J Electr Electron Mater. 1997;10(2):126-133.
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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A properties of ZnO thin film deposited by magnetron sputtering and its resistivity and microstructure due to annealing
J Electr Electron Mater. 1997;10(2):126-133.
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