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박막,센서 : Zinc Tin Oxide 투명 박막트랜지스터의 특성에 미치는 소스/드레인 전극의 영향

마대영, 최무희

Thin Films and Sensors : Influence of Source/Drain Electrodes on the Properties of Zinc Tin Oxide Transparent Thin Film Transistors

Tae Young Ma, Mu Hee Choi
J Electr Electron Mater 2015;28(7):433-438.
Published online: July 1, 2015
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Zinc tin oxide transparent thin film transistors (ZTO TTFTs) were fabricated by using n`` Si wafers as gate electrodes. Indium (In), aluminum (Al), indium tin oxide (ITO), silver (Ag), and gold (Au) were employed for source and drain electrodes, and the mobility and the threshold voltage of ZTO TTFTs were observed as a function of electrode. The ZTO TTFTs adopting In as electrodes showed the highest mobility and the lowest threshold voltage. It was shown that Ag and Au are not suitable for the electrodes of ZTO TTFTs. As the results of this study, it is considered that the interface properties of electrode/ZTO are more influential in the properties of ZTO TTFTs than the conductivity of electrode.

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Thin Films and Sensors : Influence of Source/Drain Electrodes on the Properties of Zinc Tin Oxide Transparent Thin Film Transistors
J Electr Electron Mater. 2015;28(7):433-438.   Published online July 1, 2015
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Thin Films and Sensors : Influence of Source/Drain Electrodes on the Properties of Zinc Tin Oxide Transparent Thin Film Transistors
J Electr Electron Mater. 2015;28(7):433-438.   Published online July 1, 2015
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